改进的飞秒激光加工微型光波导方法

龚小竞; 褚家如; 杨建军; 张铁群; 朱晓农

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改进的飞秒激光加工微型光波导方法

更新时间：2020-08-12

- 改进的飞秒激光加工微型光波导方法
- An improved way for fabricating micro-waveguide by femtosecond laser
- 光学精密工程 2007年15卷第1期页码：27-32
- 作者机构：
  
  1. 中国科学技术大学精密机械与精密仪器系, 安徽合肥 230027
  2. 南开大学现代光学所光电信息技术科学教育部重点实验室天津,300071
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN249;TN252
- 收稿日期：2006-04-22，
  
  修回日期：2006-11-18，
  
  网络出版日期：2007-01-30，
  
  纸质出版日期：2007-01-30
- 稿件说明：
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龚小竞, 褚家如, 杨建军, 等. 改进的飞秒激光加工微型光波导方法[J]. 光学精密工程, 2007,15(1):27-32.

GONG Xiao-jing, CHU Jia-ru, YANG Jian-jun, et al. An improved way for fabricating micro-waveguide by femtosecond laser[J]. Optics and precision engineering, 2007, 15(1): 27-32.
龚小竞, 褚家如, 杨建军, 等. 改进的飞秒激光加工微型光波导方法[J]. 光学精密工程, 2007,15(1):27-32. DOI：

GONG Xiao-jing, CHU Jia-ru, YANG Jian-jun, et al. An improved way for fabricating micro-waveguide by femtosecond laser[J]. Optics and precision engineering, 2007, 15(1): 27-32. DOI：

摘要

分析了垂直式加工中加工区域光强分布不对称的原因

从理论上总结出改进这种不对称的方法。在分析了仅引入单个透镜就能实现这一改进的可行性后

实验验证了这种改进方法。未改进之前加工出的光波导其端口两个方向直径之比为10:1

甚至更高;而改进后的比例则非常接近1:1。通过对光强不对称的改进

该方法有光路简单

无能量损失的优势。

Abstract

An improved way for fabricating micro-waveguide was presented by analysing the asymmetry of laser intensity distribution in perpendicular fabrication. By incorporating a lens into the system

the improvement of laser intensity distribution was confirmed in experiments. Experimental results show that the ratio of the diameters of the two direction of waveguide's port is more than 10:1 before improvement; the ratio is very close to 1:1 after using the improved method. Comparing with other improvement

this method is superior in simple optical path and no additional energy loss.

关键词

Keywords

references

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. 李凤友,李红军,卢振武,等. 激光直写系统焦斑整形的研究 [J]. 光学精密工程,2001,9(1): 14-18. LI F J, LI H J, LU Z W, et al.. Focused spot shaping in laser writing system [J]. Opt, Precision Eng.,2001,9(1):14-18.(in Chinese)

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