PMMA微流控芯片微通道尺寸的检测

文伟力; 左春柽; 于建群; 张学军; 刘庆民; 陈向伟; 刘 岩

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PMMA微流控芯片微通道尺寸的检测

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- PMMA微流控芯片微通道尺寸的检测
- Measurement of microchannels of PMMA microfluic chip
- 光学精密工程 2007年15卷第2期页码：212-218
- 作者机构：
  
  1. 吉林大学机械科学与工程学院,吉林长春,130025
  2. 吉林大学生物与农业工程学院,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TP391.4:TB92
- 收稿日期：2006-03-02，
  
  修回日期：2006-12-11，
  
  网络出版日期：2007-02-20，
  
  纸质出版日期：2007-02-20
- 稿件说明：
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文伟力, 左春柽, 于建群, 等. PMMA微流控芯片微通道尺寸的检测[J]. 光学精密工程, 2007,15(2):212-218.

WEN Wei-li, ZUO Chun-cheng, YU Jian-qun, et al. Measurement of microchannels of PMMA microfluic chip[J]. Optics and precision engineering, 2007, 15(2): 212-218.
文伟力, 左春柽, 于建群, 等. PMMA微流控芯片微通道尺寸的检测[J]. 光学精密工程, 2007,15(2):212-218. DOI：

WEN Wei-li, ZUO Chun-cheng, YU Jian-qun, et al. Measurement of microchannels of PMMA microfluic chip[J]. Optics and precision engineering, 2007, 15(2): 212-218. DOI：

摘要

研究了一种基于光电耦合器件(CCD)及图像处理技术的聚甲基丙烯酸甲酯(PMMA)微流控芯片微通道几何尺寸的测量系统

论述了该系统的关键技术及其实现方法

包括图像的预处理、二值化、轮廓提取以及微通道尺寸的测量等。利用该系统测量的微通道几何尺寸(1~1 000 μm)与轮廓仪和万能工具显微镜的测量结果吻合很好

最大测量误差为2 μm(半深宽度)

分析了测量误差产生的原因。检测实验结果表明:该检测方法提供的微通道几何尺寸评定正确可行、通用性好、应用简便

还可以避免轮廓仪在深结构测量中的误差。

Abstract

Based on CCD-image and image processing technology

a measuring system for microchannel's sizes was developed. The non-contact measuring method for geometrical sizes was presented by means of the digital image manipulation technology

including image preprocessing

image binary-conversion

boundary encoding and calculation of microchannel's geometrical sizes

etc. The measured results show that the maximum measuring error by proposed method is 2 μm

which accords with the results measured by a stylus profiler and a universal measuring microscope. The reasons to cause the error were analyzed

results indicate that this method is correct

feasible

simple to use

and can avoid the errors often made by stylus in deeper structures.

关键词

Keywords

references

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