光学镜面离子束加工的可达性

周 林; 戴一帆; 解旭辉; 焦长君; 李圣怡

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光学镜面离子束加工的可达性

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- 光学镜面离子束加工的可达性
- Machining reachability in ion beam figuring
- 光学精密工程 2007年15卷第2期页码：160-166
- 作者机构：
  
  国防科技大学机电工程与自动化学院,湖南长沙,410073
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TQ171.6+8
- 收稿日期：2006-04-22，
  
  修回日期：2006-11-18，
  
  网络出版日期：2007-02-20，
  
  纸质出版日期：2007-02-20
- 稿件说明：
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周林, 戴一帆, 解旭辉, 等. 光学镜面离子束加工的可达性[J]. 光学精密工程, 2007,15(2):160-166.

ZHOU Lin, DAI Yi-fan, XIE Xu-hui, et al. Machining reachability in ion beam figuring[J]. Optics and precision engineering, 2007, 15(2): 160-166.
周林, 戴一帆, 解旭辉, 等. 光学镜面离子束加工的可达性[J]. 光学精密工程, 2007,15(2):160-166. DOI：

ZHOU Lin, DAI Yi-fan, XIE Xu-hui, et al. Machining reachability in ion beam figuring[J]. Optics and precision engineering, 2007, 15(2): 160-166. DOI：

摘要

提出了离子束加工可达性问题的理论描述和定义

分析了驻留函数解的存在条件

进而分析了采用不同直径的离子束去除不同频率面形误差时额外去除量的大小

最后进行了仿真验证。分析结果表明

对于高斯型的束函数

驻留函数解总是存在的。但是面形误差频率越高

驻留函数解越大

去除面形误差时去除的额外材料越多。额外的材料去除量随着离子束径和空间误差波长之比(

d/λ)

的增加而指数增加。当

d/λ

=0.5时

额外材料去除量为15%

还是可以接受的;当

d/λ

=1时

额外材料去除量迅速上升到73%

该值即很难被接受。理论分析和仿真结果表明

为了优化加工过程

d/λ

应该＜0.5。

Abstract

The conception and theoretical definition of machining reachability problem is proposed

and the existence condition of the solution of Dwell Time(DT) function is analyzed. Furthermore

we analyze and simulate the magnitude of the Extra Material Removal (EMR) in different process condition using different ion beam diameter to remove different spatial frequency surface errors. The analysis results show that the solution of DT function exists for the ion beam removal functions of Gaussian shape. However

for the higher spatial frequency surface error

the larger the solution of DT function is; the larger the magnitude of the EMR is. The magnitude of EMR is an exponential function of the ratio of ion beam diameter to the spatial surface error wavelength (i.e.

d/λ

). And when

d/λ

= 0.5

the EMR is 15%

which is acceptable in ion beam figuring process. When

d/λ

it rapidly increases to 73%

which is unacceptable. Theoretical analysis and simulation results indicate that

d/λ

should be less than 0.5 in order to obtain acceptable process in IBF.

关键词

Keywords

references

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