双腔串联两阀与三阀压电泵的性能研究

杨志刚; 孙晓锋; 张德君; 程光明; 李欣欣

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双腔串联两阀与三阀压电泵的性能研究

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- 双腔串联两阀与三阀压电泵的性能研究
- Performance research on double-valved and three-valved piezoelectric pumps with double series-wound chambers
- 光学精密工程 2007年15卷第2期页码：219-223
- 作者机构：
  
  1. 吉林大学机械科学与工程学院,吉林长春,130025
  2. 吉林化工学院机电工程系,吉林吉林,132022
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH38;TN384
- 收稿日期：2006-09-14，
  
  修回日期：2006-12-13，
  
  网络出版日期：2007-02-20，
  
  纸质出版日期：2007-02-20
- 稿件说明：
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杨志刚, 孙晓锋, 张德君, 等. 双腔串联两阀与三阀压电泵的性能研究[J]. 光学精密工程, 2007,15(2):219-223.

YANG Zhi-gang, SUN Xiao-feng, ZHANG De-jun, et al. Performance research on double-valved and three-valved piezoelectric pumps with double series-wound chambers[J]. Optics and precision engineering, 2007, 15(2): 219-223.
杨志刚, 孙晓锋, 张德君, 等. 双腔串联两阀与三阀压电泵的性能研究[J]. 光学精密工程, 2007,15(2):219-223. DOI：

YANG Zhi-gang, SUN Xiao-feng, ZHANG De-jun, et al. Performance research on double-valved and three-valved piezoelectric pumps with double series-wound chambers[J]. Optics and precision engineering, 2007, 15(2): 219-223. DOI：

摘要

研究了双腔串联两阀压电泵与三阀压电泵的输出性能

分析了这两种泵的结构和工作原理

理论分析得出:三阀泵输出性能优于两阀泵。设计制作了两阀泵与三阀泵实验样机

并通过实验测试证明了理论分析的正确性。分别对两阀泵和三阀泵进口腔和出口腔独立工作时流量输出进行了实验测试

并把进口腔和出口腔独立工作时输出流量相加之和

与两腔一起交叉工作时进行了比较。实验测试表明:两阀泵和三阀泵样机在200 V交流驱动电压下

最大输出流量分别为972 ml/min和1 035 ml/min

最大输出压力分别为28.7 kPa和40 kPa

最大自吸高度分别为0.41 m和0.43 m水柱高。

Abstract

By analyzing the working principles and structures of double-valved and three-valved piezoelectric pumps with double series-wound chambers

it was proved that the output ability of three-valved pump is better than that of double-valved pump. To explain the theoretical analyis

the pump samples were designed and manufactued

several experiments had been done when inlet chamber and outlet chamber work respectively

and the sum of flowrates was compared with that produced by their double chambers working together alternately. Experimental results show that double-valved and three-valved piezoelectric pumps' maximal output flowrates are 972 ml/min and 1 035 ml/min

maximal output pressures are 28.7 kPa and 40 kPa

and maximal self-suction heights are 0.41 mH

O and 0.43 mH

respectively when they are powered by AC 200 V

which indicates that the results agree with the theory very well.

关键词

Keywords

references

. LINNEMANN R,WOIAS P,SENFFT C D,et al.. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquid and gases . Proc.of the 11th IEEE MEMS 1998 Technical Digest,Heidelberg,1998:532-537.

. RICHTER M, LINNEMANN R, WOIAS P.Robust design of gas and liquid micropumps [J].Sensors and Actuator A,1998,68:480-486.

. CUNNEEN J, LIN Y CH,CARAFFIN S,et al..A positive displacement micropump for micro-dialysis [J]. Mechatronics, 1998,8:561-583.

. KOCH M, HARRIS N,EVANS A G R, et al.. A novel micromachined pump based on thick-film piezoelectric actuation [J]. Sensor Actuator A, 1998,70:98-103.

. B H M S,OLTHUIS W,BERGVELD P. A plastic micro-pump constructed with conventional techniques and materials [J]. Sensor Actuator 77,1999,223-228.

. 杨树臣,程光明,刘国君,等. 微型压电泵系统的设计研究[J]. 光学精密工程,2005,13(3):318-323. YANG SH CH,CHENG G M,LIU G J,et al..Design of piezoelectric micro-pump . Opt. Precision Eng., 2005,13(3):318-323.(in Chinese)

. 赵明丽,黄琴,张玮,等. 悬臂梁阀单腔压电泵设计方法研究[J]. 光学精密工程,2006,14(4):607-611. ZHAO M L,HUANG Q,ZHANG W,et al.. Investigation on design method of single chamber piezoelectric pump with cantilever valve[J]. Opt. Precision Eng.,2006,14(4):607-611.(in Chinese)

. 孙晓锋,杨志强,刘晓论,等. 整体开启阀与悬臂梁阀压电泵性能研究[J]. 光学精密工程,2006,14(4):648-651. SUN X F,YANG ZH Q,LIU X L,et al.. Performance research on piezoelectric pumps based on holistic opening valve and cantilever valve[J]. Opt.Precision Eng.,2006,14(4):648-651.(in Chinese)

. 程光明,杨志刚,曾平. 压电泵泵腔体积变化量研究 . 压电与声光,1998,20(6):389-392. CHENG G M, YANG ZH G, ZENG P. Research on the cavity volume fluctuations of piezoelectric pump[J]. Piezoelectrics & Acoustooptics, 1998,20 (6):389-392.(in Chinese)

. 李军,程光明,杨志刚,等. 一种改进的平板式无阀压电流体泵[J]. 压电与声光,2001,23(5):351-353. LI J, CHENG G M, YANG ZH G, et al.. A plate valveless piezoelectric pump with improved structure [J]. Piezoelectrics & Acoustooptics, 2001,23(5): 351-353.(in Chinese)

. SCHABMUELLER C G J, KOCH M,MOKHTARI M, et al.. Self-aligning gas/liquid micropump[J]. J.Micromech Mcroeng,2002,12:420-424.

. 夏齐霄,张建辉,李洪. 非对称坡面腔底无阀压电泵[J]. 光学精密工程,2006,14(4):641-647. XIA Q X,ZHANG J H,LI H. Valveless piezoelectric pump with unsymmetrical slope chamber bottom[J]. Opt.Precision Eng.,2006,14(4):641-647.(in Chinese)

. 阚君武,杨志刚,刘品宽,等. 两腔体串联压电驱动微型泵的输出特性[J]. 哈尔滨工业大学学报,2004,36(10):1347-1350. KAN J W, YANG ZH G, LIU P K, et al.. Output characters of piezoelectric micropumps with double series-wound chambers[J]. J. Harbin Ins.Technol., 2004,36(10):1347-1350. (in Chinese)

. 曾平,程光明,刘九龙,等. 双腔薄膜阀压电泵的试验研究[J]. 光学精密工程,2005,13(3):311-316. ZENG P,CHENG G M,LIU J L,et al.. Experimental research on double-chambered piezoelectric pump with membrane valves[J].Opt. Precision Eng., 2005,13(3):311-316.(in Chinese)

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