To understand the relationship of the mold structure with the flow profile

the Deform-2D code was used to simulate the micro hot embossing process. The mold duty ratio

the ratio of the mold width to the polymer thickness (ROWT)

the concave mold

the convex mold and the non symmetric mold with respect to the polymer flow profile were systematically studied for the first time. The numerical simulation results show that with the decrease of the duty ratio

the flow profile of the polymer changes from single peak to dual peak

from craggedness to flatness and when ROWT is more than 1.5

the flow profile becomes dual peak. The simulation results were verified by the relative experiments. Compared with the results of nearly no pattern height difference when embossing with the convex mold

the micro pattern height has distinct difference when the concave mold is used. The optimization strategy of the mold topological structure was proposed to improve the polymer filling efficiency. With the help of some flow barriers located at the edge of the mold

the polymer flow speed at the boundary can be decreased and the effective filling will be enhanced. The numerical results show that this optimization strategy can increase the polymer filling speed in hot embossing process.