Discussed the characteristics of the micro electroforming process systematically and analyzed the property of the electric field and flow field. The asymmetry of the electroforming and the effect of the stirring mode

current density on the microstructure were studied in detail. From experiment it can be concluded that the effect of the pure stirring reach the entrance of the micro groove only

diffusion is the control factors of micro electroforming. The equipotential line curvature of electric field grew with the increasing aspect ratio of the deposit. Which result in the discrepancy of ion transferring capacity in the reaction area. The results showed that the stirring velocity could not improve transferring condition

while complex stirring (assistant with ultrasound) could help to the deposit velocity and get the perfect microstructure. The optimal current density was less than 0.9～1.0A/dm2 in the process. Based on the research high resolute electroforming microstructure with vertical wall was fabricated.