With the quickly development of the IC industry

the positioning table used in the encapsulation installment must possess the characteristics of high and high velocity and high accelerate. It is necessary to study a novel high accelerate and high precision positioning mechanism. Orient to this requirement

a novel precision positioning mechanism is presented. It consists two parallelograms chains

and is drove directly by linear voice motors. Firstly

Largrange equations are used to build the dynamic model of the mechanism. Secondly

based on the singularity value theory

the expressions of velocity extremum and acceleration extremum are obtained. Then the velocity characteritics

and the acceleration ability subject to the limitation of the joint force are analyzed. The analyse results illustrate that the positioning table can get the maximum velocity 0.8m/s at the worst case

the maximum acceleration 12g at the worst case 14g at the best case. Experiments validate that the presented positioning stage can get above performance index and possess the high accelerate characteristics.