Aimed at the technical difficulty of low electric conductivity of new-style organic semiconductor

bring forward a kind of laminated microstructure on porous upper electrode

use the technology of vacuum deposition to form gas sensitive film

and adopt MEMS micro-fabrication to make gas sensor. According as the equivalent circuit and the technology boundary condition

through the conductance formula deduce that the output conductance of the sensor has increased 1000 times

has settled the signal gathering problem of organic semiconductor. Through SEM microcosmic pattern

affirm the best condition

evaporating electric current is 100~120A

and evaporating time is 8~12s. The surface of gas sensitive film is covered with activated granules

which are inosculated in the secondary chemical reaction

like rice grain

about 200nm

symmetrical

uniform and has order holes. The testing result indicates that CuPcxPANI1-x doped with vitriol whose coefficient of proportionality is 0.15~0.35 has the best sensitivity to SO2

considering reducing the interference of H2S

select CuPc0.35PANI0.65; when heating voltage VH is 1~2.5V

sensitivity and responsive restorability will be enhanced

and responsive time is 30 seconds; the output characteristic of sensor is single logarithmic linear relation

and the detecting range is 0~200×10-6; through examination of stability for six months

output impedance is less than or equal to ±5%

sensitivity is less than or equal to 10%.