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1. 南京理工大学
2. 南京工业职业技术学院
收稿日期:2007-10-08,
修回日期:2007-12-03,
网络出版日期:2008-05-22,
纸质出版日期:2008-05-22
移动端阅览
赵燕,苏岩. 驱动方式对微流体陀螺仪输出信号的影响[J]. 光学精密工程, 2008,16(5):889-893
The Influence of Drive on Output Signals of Micro-fluidic Gyroscope[J]. Optics and precision engineering, 2008, 16(5): 889-893.
目的:针对微型热对流陀螺仪敏感输出信号非常微弱、不易测量的特点,本文给出了不同驱动方式下输出信号的检测及其对输出信号产生的影响。方法:首先,分析了微流体陀螺仪传感器的工作原理,接着,给出了直流电压驱动和交流电压驱动时的信号检测方案。直流电压驱动时,敏感到直流流速,经过差动电桥放大后,可得到输出电压。交流电压驱动时,可敏感到交流流速,用相干检测方法提取出有用信号,通过低通滤波器、放大器,最终得到直流电压,该电压信号正比于外界输入角速度。结果:实验数据分析可得:直流电压驱动时输出信号线性度为1.62%,零位电压不断升高,交流电压驱动时输出信号的线性度达0.113%,零位电压较稳定。结论:在零位电压稳定性、线性度两方面交流电压驱动方式性能更优。
Objetive: The output signals
induced by micro-fluidic inertial sensor based on the principle of convection heat transfer
were too weak to be detected easily. Now two methods are applied to drive this kind of gyros and then influence on the character performance. Method : First
the operational principle of these devices were analyzed. A silicon micro-fluidic gyro was comprised of a chamber and along each side of the fluid center axis disposed a thermocouple symmetrically. During zero input angular velocity
the temperature was symmetrical such that both thermocouples sensed the same temperature and therefore provided the same output voltage. While the gyro worked
the Coriolis acceleration,induced by an external angular velocity
caused the deflections of fluid velocity to cool the thermocouples oppositely
then
through Wheatstone bridge circuit the temperature disturbance of thermocouples could be converted to a differential output voltage proportional to the applied angular rate of motion. Secondly
the micro-fluidic inertial sensor might be driven by two methods
DC and AC signals. The AC drive technology included the alternating current driving and the alternating voltage driving. The DC actuated might increase the temperature of chamber
driver resistors and the power similar as the alternating current driving. On the contrary
the alternating voltage drive also increased the temperature of chamber as well as resistors but decreased the power of drive. This might influence the character performance of output signals
such as zero drift. Finally
the methods of corresponding measurement and the block diagram were discussed as well. When DC driving
a DC velocity was induced and amplified directly to extract a DC differential output voltage proportional to the external angular velocityω. On the other hand
if the alternating voltage drive was used
the required signals included in sine wave velocity could be selected out with the use of phase sensitively demodulation (PSD)
then passed through low-pass filters
amplified and at last obtained the DC voltage proportional to the external angular velocityω. Result: Experimental results indicate that the zero drift of output signals rise continuously and the linearity is 1.62% by DC driving while 0.113% with the alternating voltage actuated. Conclusion: It is concluded that the micro-fluidic gyroscope is characterized by stable zero drift and better linearity with the drive of alternating voltage.
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