Abstract: Objective: To resolve problems of AFM in the applications of measurement of nanomechanical properties of samples such as: the force-depth curve can not be obtained directly and the loading time

keeping time at the peak load and the unload time can not be varied arbitrarily

and so on

AFM system is modified. Mehotd: A Single Chip Micyoco (SCM)-based input/output module is developed in the present study. This module is connected to the control system of AFM

forming a novel AFM-based nanomechanical property measurement system. Result：The normal load can be changed continuously. According to the corresponding arithmetic

the in-situ force-depth curve can be achieved. The out rate of the D/A output port can be varied by the SCM controller

which can change the rate of loading

unloading and keeping period. Integrated with a two-dimensional precision stage

the array indentation tests can be carried out with a larger scale. Conclusion: Nanoindentation tests on polycarbonate and Polydimethylsiloxane show that based on this system

the nanomechanical properties parameters of samples can be achieved with high accuracy and high speed. Samples like PDMS

micro beam and so on can also be investigated under the pure elastic deformation.