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中国科学技术大学国家同步辐射实验室
收稿日期:2007-10-15,
修回日期:2007-11-29,
网络出版日期:2008-07-25,
纸质出版日期:2008-07-25
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liuzhengkun,徐向东,谭鑫,洪义麟. 变栅距光栅衍射特性分析[J]. 光学精密工程, 2008,16(7):1153-1157
Diffraction Characteristic of Varied line-space Grating[J]. Optics and precision engineering, 2008, 16(7): 1153-1157.
光纤式变栅距光栅位移传感器是一种新的位移传感器,变栅距光栅是该位移传感器的核心元件,传感器的位移分辨率决定于变栅距光栅的光谱分辨,分析和研究如何提高变栅距光栅的光谱分辨能力是位移传感器提高位移分辨的关键。基于夫琅和费衍射理论,推导了对于变栅距光栅,平行光入射后的衍射光强的角度分布。计算变栅距光栅参数相同,入射光斑宽度分别为5mm和10mm衍射光的分布特点;10mm入射光斑,光栅参数不同时衍射光的分布特点。实验验证了不同入射光斑宽度对光纤式变栅距光栅位移传感器分辨率的影响。由于变栅距光栅的衍射特点,入射光斑直径的大小是传感器分辨率的一个重要影响因素。
Wavelength encoding long stroke fiber optic linear position sensor is a kind of optics displacement sensor
which used a Varied line-space grating (VLS grating) as the hardcore. The resolving power for the displacement depend on the resolving power for the spectrum
so the improvement of the resolving power for the spectrum is very important to the sensor. Based on the Fraunhofer diffraction
the diffraction patterns of VLS grating is obtained when the beam of incidence is parallel and uniform. The intensity of the diffraction facular changing with diffraction angle was figured out and pictured
when the diameter of incident facular was 5mm and 10mm to the same VLS grating
and when the diameter of incident facular was 10mm to different VLS grating.The result was validated by the experimentation for the sensor’s resolving power when the diameter of incident facular was different for the same VLS grating. The result revealed that the diameter of incident facular was very important to the sensor’s resolving power for the diffraction pattern of VLS grating.
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