According to the output performance of inchworm-type piezoelectric actuator

proposed a novel close-loop control method which was based on the subsection experiential equation between actuating voltage and corresponding stepping motion displacement. Via that method

the control system could search for the optimal actuating voltage step by step so as to approach target position. Carried on experiment to the closed-loop system of the inchworm-type piezoelectric rotary actuator. The experimental results showed that the novel method could control the actuator for precision positioning in closed-loop mode

and the position precision was improved by 14.4% compared to the open-loop working mode. The control method had the advantages of high accuracy

quick response and et al.