13.9 nm Laminar分束光栅的研制

谭鑫; 刘颖; 徐向东; 洪义麟; 付绍军

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13.9 nm Laminar分束光栅的研制

现代应用光学 | 更新时间：2020-08-12

- 13.9 nm Laminar分束光栅的研制
- 13.9 nm Laminar grating as beam splitter
- 光学精密工程 2009年17卷第1期页码：33-37
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学技术大学国家同步辐射实验室,安徽合肥 230029
- 作者简介：
- 基金信息：
  
  国家自然科学基金委员会与中国工程物理研究院联合基金资助(No.10676032)();国家863高技术探索基金资助项目();中国科学技术大学校青年基金资助项目()
- DOI：
  中图分类号： O436.1;TH744.3
- 收稿日期：2008-03-14，
  
  修回日期：2008-04-23，
  
  网络出版日期：2009-01-25，
  
  纸质出版日期：2009-01-25
- 稿件说明：
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谭鑫, 刘颖, 徐向东, 洪义麟, 付绍军. 13.9 nm Laminar分束光栅的研制[J]. 光学精密工程, 2009,17(1): 33-37

TAN Xin, LIU Ying, XU Xiang-dong, HONG Yi-lin, FU Shao-jun. 13.9 nm Laminar grating as beam splitter[J]. Editorial Office of Optics and Precision Engineering, 2009,17(1): 33-37
谭鑫, 刘颖, 徐向东, 洪义麟, 付绍军. 13.9 nm Laminar分束光栅的研制[J]. 光学精密工程, 2009,17(1): 33-37 DOI：

TAN Xin, LIU Ying, XU Xiang-dong, HONG Yi-lin, FU Shao-jun. 13.9 nm Laminar grating as beam splitter[J]. Editorial Office of Optics and Precision Engineering, 2009,17(1): 33-37 DOI：

摘要

利用全息-离子束刻蚀工艺制作了工作波长为13.9 nm的Laminar分束光栅。光栅的线密度为1 000 lp/mm

槽深13 nm

占宽比0.43

Au膜厚度为40 nm左右;当工作波长为13.9 nm

入射角为81.2时

其0级与-1级衍射光衍射效率乘积的最大值为8.1％

同时0级与-1级衍射效率亦接近

约为27％和30％。实验结果表明

研制的Laminar光栅可用于13.9 nm激光的分束

能够获得＞7%的分束效率。

Abstract

A Laminar grating with a 1 000 lp/mm rectangular Laminar groove profile

13 nm groove depth and a 0.43 duty cycle is fabricated by holographic ion beam etching. The grating is coated by Au in thickness of 40 nm. When the work wavelength is 13.9 nm

the product of the zero order and the first order light diffractions is close to 8.1% at an incident angle of 81.2

and the diffraction efficiencies of the zero order and the first order are approximately equal. Experimental results illustrate the potential of Laminar grating as a beam splitter at 13.9 nm and also show its efficiency can be higher than 7%.

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references

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