Objective: Multichannel flexible neural microelectrodes were designed and fabricated. The fabrication process of microelectrodes was studied. Method: A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material

parylene C

due to its excellent electrical insulating

mechanical and biocompatible performances. Result: A 36 channel flexible neural microelectrode was fabricated

arranging in a 6×6 square grid pattern. The size of microelectrode was 150m (circular) and 150m×150m (squre)

respectively. The line width of metal traces was 30m. It was found that the surface of microelectrode was smooth and the outline of microelectrode was distinct. The impedance of microelectrode was only 7k or so

and reduced as frequency increasing

showing a high-pass behavior. Conclusion: The microelectrodes and flexible substrate were integrated by the microfabrication technology. Fabricated microelectrodes had nice quality and good electrical property

which was suitable for the application in retinal prostheses.