像差修正拼接法测量非球面精度的评定

乔玉晶; 吕宁

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像差修正拼接法测量非球面精度的评定

现代应用光学 | 更新时间：2020-08-12

- 像差修正拼接法测量非球面精度的评定
- Precision estimation of aspheric surface by stitching interferometry based on correcting aberration
- 光学精密工程 2009年17卷第3期页码：519-524
- 作者机构：
  
  哈尔滨理工大学机械动力工程学院,黑龙江哈尔滨,150080
- 作者简介：
- 基金信息：
  
  哈尔滨市青年科学研究基金资助项目(No.2004AFQXJ050)();黑龙江省教育厅资助项目(No.10051059)()
- DOI：
  中图分类号： TH744.3;TQ171.6+5
- 收稿日期：2008-03-17，
  
  修回日期：2008-05-28，
  
  网络出版日期：2009-03-25，
  
  纸质出版日期：2009-03-25
- 稿件说明：
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乔玉晶, 吕宁. 像差修正拼接法测量非球面精度的评定[J]. 光学精密工程, 2009,17(3): 519-524

QIAO Yu-jing, L Ning. Precision estimation of aspheric surface by stitching interferometry based on correcting aberration[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 519-524
乔玉晶, 吕宁. 像差修正拼接法测量非球面精度的评定[J]. 光学精密工程, 2009,17(3): 519-524 DOI：

QIAO Yu-jing, L Ning. Precision estimation of aspheric surface by stitching interferometry based on correcting aberration[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 519-524 DOI：

摘要

针对用子孔径干涉像差修正拼接法测量非球面的拼接精度问题

提出了一种基于

分布统计的拼接精度分析评定方法。根据测量原理及拼接模型特点

利用残差分析对模型进行回归诊断

使用因变量预测算法和t分布统计模型对拼接精度进行估计与分析。实验结果显示:按

分布评定拼接结果的扩展不确定度为0.362 3

(0.229 m)

而常规的系统误差检验方法评定拼接结果的扩展不确定度为0.234 m

两种方法结果基本一致

表明基于

分布统计的方法在保证评定结果准确度的前提下

克服了比较分析法的不确定性

解决了正态分布统计法中置信系数

不能反映子样标准差可靠性对置信概率的影响问题。

Abstract

A method for analyzing and evaluating stitching precision based on

distribution statistic was presented aiming at the problem of stitching precision of aspheric surface analyzed by sub-aperture interferometry based on correcting aberration. The residual error was used to implement the regression diagnosis according to the principle of stitching measurement and the feature of stitching model. Then

based on

distribution statistic

the forecast dependent variable in the regression analysis was used to assesse and analyze the stitching precision. The uncertainty in experiment result was analyzed

analyzed result indicates that the expansion uncertainty based on

distribution statistic is 0.362 3

(0.229 m)

and the expansion uncertainty by the conventional precision evaluating method is 0.234 m. The results of the two precison evaluating methods are idential basically

which shows the new precison evaluating algrithom overcomes the uncertainty of comparative analyzing method on the premise of ensuring the precision

and also solves the problem that the confident coefficient according to normal distribulion can not reflect the effect of sample root-mean-square reliability on the fiducial probability.

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Keywords

references

KIM C J,WYANT J. Subaperture test of a large flat on a fast spherical surface[J]. Opt. Soc. Am.,1981,71,15-87.[2] 王孝坤,张学军,王丽辉,等. 环形子孔径拼接干涉检测非球面的数学模型和仿真研究[J]. 光学精密工程,2006,14(4):527-533. WANG X K, ZHANG X J, WANG L H, et al.. Mathematical model and simulation for testing aspheric surface by annular subaperture stitching interferomety[J]. Opt. Precision Eng., 2006,14(4):527-533.(in Chinese)[3] 侯溪,伍凡,杨力,等. 环形子孔径拼接检测大口径非球面的规划模型及分析[J]. 光学精密工程,2006,14(2):207-212. HOU X, WU F, YANG L, et al.. Layout model and analysisi of annular subaperture stitching technique for testing large aspheric mirror [J]. Opt. Precision Eng., 2006,14(2):207-212.(in Chinese)[4] 王孝坤,王丽辉,张学军. 子孔径拼接干涉法检测非球面[J]. 光学精密工程,2006,15(2):192-197. WANG X K, WANG L H, ZHANG X J. Testing asphere by subaperture stitching interferometric method [J]. Opt. Precision Eng., 2006,15(2):192-197. (in Chinese)[5] MURPHY P. Stitching interferometry: a flexible solution for surface metrology [J]. Optics and Photonics News, 2003,5(14):38-43.[6] 程维明, 林有略, 陈明仪. 多孔径扫描波面恢复技术的精度评定及影响因素[J]. 光学学报, 1993,13(8):711-716. CHENG W M, LIN Y L, CHEN M Y. Factors having influence on the accuracy of multi-aperture overlape-scanning technique (MAOST) and analysis[J]. Acta Iptica Sincica,1993,13(8): 711-716.(in Chinese)[7] 张明意,李新南. 子孔径拼接法检验大口径光学镜面精度分析[J]. 应用光学,2006,27(5):447-449. ZHANG M Y, LI X N. Accuracy analysis of stitching interferometry for test of large diameter mirror[J]. Journal of Applied Optics, 2006,27(5):447-449. (in Chinese)[8] 张蓉竹,杨春林,石琦凯,等. 子孔径拼接干涉检测及其精度分析[J]. 光学学报,2003,23(10): 1241-1244. ZHANG R ZH, Y CH L, SHI Q K, et al.. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sincica,2003,23(10): 1241-1244. (in Chinese)[9] 王松桂,陈敏,陈萍. 线性统计模型——线性回归与方差分析[M]. 北京:高等教育出版社,2004. WANG S G, CHEN M, CHEN P. Linear Statistical Models:Linear Regression and Analysis of Variance[M]. Beijing: Higher Education Press,2004. (in Chinese)

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