二维快速控制水冷反射镜装置设计

邵帅; 高云国; 郭劲; 宣明

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二维快速控制水冷反射镜装置设计

现代应用光学 | 更新时间：2020-08-12

- 二维快速控制水冷反射镜装置设计
- Design of two-dimensional fast-steering cooling mirror equipment
- 光学精密工程 2009年17卷第3期页码：493-498
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(No.057X22C050)()
- DOI：
  中图分类号： TH703;TN243
- 收稿日期：2008-06-25，
  
  修回日期：2008-07-28，
  
  网络出版日期：2009-03-25，
  
  纸质出版日期：2009-03-25
- 稿件说明：
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邵帅, 高云国, 郭劲, 宣明. 二维快速控制水冷反射镜装置设计[J]. 光学精密工程, 2009,17(3): 493-498

SHAO Shuai, GAO Yun-guo, GUO Jin, XUAN Ming. Design of two-dimensional fast-steering cooling mirror equipment[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 493-498
邵帅, 高云国, 郭劲, 宣明. 二维快速控制水冷反射镜装置设计[J]. 光学精密工程, 2009,17(3): 493-498 DOI：

SHAO Shuai, GAO Yun-guo, GUO Jin, XUAN Ming. Design of two-dimensional fast-steering cooling mirror equipment[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 493-498 DOI：

摘要

为了进一步精确控制激光发射方向

减少反射镜热畸变以提高光束质量

设计了一种新型二维快速控制水冷反射镜装置。根据高功率激光反射镜的设计和制作原则

对反射镜的材料性能进行了分析

采用主动水冷铜镜来减小镜面热畸变使镜面变形控制在0.1 m以内。然后

分别从机械结构、驱动器和控制系统、角度检测元件3方面设计了反射镜装置

其

x-y

轴框架式的机械结构形式

可减小反射镜的冷却水管对轴系回转精度的影响

使回转精度＜2。实验测试结果表明

二维快速控制水冷反射镜装置工作稳定、可靠

控制光束稳定的精度＜1

可满足对激光传输方向的精确实时控制和对光束整体倾斜方向进行校正等要求。

Abstract

A mechanical structure for two-dimensional fast-steering active cooling mirror was designed to control precisely the transmission direction of laser emitting and to reduce the mirror thermal distortion to improve laser beam quality. Based on the design and fabrication principles for the high power laser reflector

an active cooling mirror was adopted to improve the beam quality by reducing the mirror thermal distortion which can control the mirror distortion less than 0.1 m. Then

an equipment was designed from three aspects in the framework

driver

controlling system and the angle measurement element. By using a

x-y

axis framework structure

the effect of the cooling water tube for mirror on axis system could be reduced and rotation precision of the axis system was less than 2. The test result was analyzed and it is shown that the mechanical structure works stably and reliably

stabilization precision is less than 1

which can satisfy the system requirements of stabilization

higher precision and rapid speed for controlling and correcting accurately the transmission direction of the beam

and can be applied widely to the high power laser system.

关键词

Keywords

references

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