压电微动工作台的动态迟滞模型

张栋; 张承进; 魏强

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压电微动工作台的动态迟滞模型

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电微动工作台的动态迟滞模型
- Dynamic hysteresis model of piezopositioning stage
- 光学精密工程 2009年17卷第3期页码：549-556
- 作者机构：
  
  1. 山东大学控制科学与工程学院,山东济南,250061
  2. 泰山学院物理与电子科学系,山东泰安 271021
- 作者简介：
- 基金信息：
  
  山东省科技发展计划资助项目(No.2007GG30D04D02)()
- DOI：
  中图分类号： TN384;TP271
- 收稿日期：2008-06-16，
  
  修回日期：2008-07-23，
  
  网络出版日期：2009-03-25，
  
  纸质出版日期：2009-03-25
- 稿件说明：
移动端阅览
张栋, 张承进, 魏强. 压电微动工作台的动态迟滞模型[J]. 光学精密工程, 2009,17(3): 549-556

ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 549-556
张栋, 张承进, 魏强. 压电微动工作台的动态迟滞模型[J]. 光学精密工程, 2009,17(3): 549-556 DOI：

ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 549-556 DOI：

摘要

为实现压电微动工作台的快速准确运动定位

研究了其运动定位模型。压电工作台的运动定位精度主要受工作台动态特性和迟滞特性的影响

在介绍这两类典型特性模型及其适用范围的基础上

提出了能够同时体现压电工作台动态特性和迟滞特性的动态迟滞模型

并给出了采用Prandtl-Ishlinskii (PI)迟滞算子的动态迟滞模型参数辨识途径。以TRITOR100型压电工作台为例进行实验研究

结果表明:当压电工作台在30 m的定位范围内以900 V/s的输入电压速率进行快速运动定位时

动态迟滞模型的模型精度比以往常用的线性动态模型和迟滞模型有较大提高

其平均误差为0.16 m

最大误差为0.38 m

为高性能运动定位工作台控制系统的设计提供了模型基础。

Abstract

In order to realize dynamic positioning of piezopositioning stage with high speed and high accuracy

the motion positioning model of the stage is studied. Because the dynamic positioning accuracy of piezopositioning stage is affected primarily by dynamic property and hysteresis property of the stage

this paper proposes a dynamic hysteresis model of piezopositioning stage after introducing two kinds of typical property models and their applicable scopes. Furthermore

the parameter identification method of the dynamic hysteresis model constituting of Prandtl-Ishlinskii (PI) hysteresis operator is given. Experimental studies on the TRITOR100 piezopositioning stage indicate that the dynamic hysteresis model is more accurate than both the linear dynamic model and PI hysteresis model when the stage positioning is dynamically positioned at high speed in 900 V/s input voltage within 30 m positioning range. The mean error of the dynamic hysteresis model is 0.16 m

and the maximum error is 0.38 m

which provides foundations for designing high performance control system of piezopositioning stage.

关键词

Keywords

references

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