固着磨料加工碳化硅反射镜的微观理论模型

王旭; 张学军

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固着磨料加工碳化硅反射镜的微观理论模型

现代应用光学 | 更新时间：2020-08-12

- 固着磨料加工碳化硅反射镜的微观理论模型
- Micro theoretical model for grinding SiC mirror with fixed abrasive
- 光学精密工程 2009年17卷第3期页码：513-518
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(065X32CN60)
- DOI：
  中图分类号： TH703;TN304.05
- 收稿日期：2008-06-04，
  
  修回日期：2008-07-10，
  
  网络出版日期：2009-03-25，
  
  纸质出版日期：2009-03-25
- 稿件说明：
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王旭, 张学军. 固着磨料加工碳化硅反射镜的微观理论模型[J]. 光学精密工程, 2009,17(3): 513-518

WANG Xu, ZHANG Xue-jun. Micro theoretical model for grinding SiC mirror with fixed abrasive[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 513-518
王旭, 张学军. 固着磨料加工碳化硅反射镜的微观理论模型[J]. 光学精密工程, 2009,17(3): 513-518 DOI：

WANG Xu, ZHANG Xue-jun. Micro theoretical model for grinding SiC mirror with fixed abrasive[J]. Editorial Office of Optics and Precision Engineering, 2009,17(3): 513-518 DOI：

摘要

基于固着磨料加工碳化硅反射镜的微观作用原理

从理论上定量分析了金刚石磨料压入碳化硅工件的深度对材料去除率、光学元件表面粗糙度的影响

分别获得了材料去除率数学模型及粗糙度的仿真计算结果。实验与理论模型的对比结果表明:去除率实验值与理论值走势相同并稳定在同一数量级内;粗糙度实验所使用的W1.5

W3.5

W5等丸片获得的粗糙度理论值与实验偏差分别为5.97%

3.19%

3.59%

由此验证了理论分析的正确性。

Abstract

Based on micro-interaction principle of fabricating SiC material with fixed abrasive

this paper quantitatively discussed the influence of depth of diamond abrasive formed in SiC workpiece on the material removal rate and surface roughness of optical component. The mathematical model of material removal rate and the simulation results of surface roughness were obtained

respectively. By comparison of experimental results with theory in material removal rate and surface roughness

the trend of theoretical and experimental results are basically the same and the values of results are maintained in the same quantitative level; The difference of roughness of pellets W1.5

W3.5

W5 in experiment and theory are 5.97%

3.19%

3.59%

respectively

which can validate the correctness of theory analysis.

关键词

Keywords

references

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