In order to measure temperature in high-precision

a high-performance and fully digital smart temperature sensor is designed

which comprises a quartz tuning fork resonator

an interface with Complementary Metal Oxide Semiconductor(COMS ) and a controlling algorithm for sensor reconfiguration based on the Field Programmable Gate Array(FPGA). According to the piezoelectricity effect of a quartz

the thermosensitive cut for the quartz tuning fork resonator and the electrode configuration are analyzed

and the resonant differential equation of the quartz resonator working in a flexural vibrating mode is derived from mechanical vibration. Then

the design principle for the quartz tuning fork temperature sensor is discussed

and the characteristic parameter of temperature sensor is extracted.Finally

the nonlinear error of the sensor is analyzed. The quartz tuning fork resonator is fabricated by a photolithography and an etching technology

in which the frequency output is from the interface IC to FPGA and the special controlling algorithm may easily realize the sensor reconfiguration and the automatic calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach 65×10

-6

/℃ at the temperature ranges from -20 ℃ to 140 ℃

which guarantees the precision of 0.01 ℃

the resolution of 0.001 ℃

and the response time of 1 s.