莫尔条纹信号相位误差补偿

吕孟军; 郭琪; 吕印晓

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莫尔条纹信号相位误差补偿

信息科学 | 更新时间：2020-08-12

- 莫尔条纹信号相位误差补偿
- Signal phase error compensation of Moiré fringe
- 光学精密工程 2009年17卷第7期页码：1694-1700
- 作者机构：
  
  1. 空军第一航空学院,河南信阳,464000
  2. 南京航空航天大学能源与动力学院,江苏南京,210016
- 作者简介：
- 基金信息：
  
  江苏省精密与微细制造技术重点实验室开放基金资助项目(No.20060306)();国家自然科学基金资助项目(No.50605031)()
- DOI：
  中图分类号： TP274.5;O436.1
- 收稿日期：2008-08-10，
  
  修回日期：2008-09-28，
  
  网络出版日期：2009-07-25，
  
  纸质出版日期：2009-07-25
- 稿件说明：
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吕孟军, 郭琪, 吕印晓. 莫尔条纹信号相位误差补偿[J]. 光学精密工程, 2009,17(7): 1694-1700

LV Meng-jun, Guo Qi, LV Yin-xiao. Signal phase error compensation of Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1694-1700
吕孟军, 郭琪, 吕印晓. 莫尔条纹信号相位误差补偿[J]. 光学精密工程, 2009,17(7): 1694-1700 DOI：

LV Meng-jun, Guo Qi, LV Yin-xiao. Signal phase error compensation of Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1694-1700 DOI：

摘要

为减小莫尔条纹信号不正交时的正切法细分误差

提出了一种可对任意相位滞后误差进行实时补偿的新算法。在分析了相位不正交对细分精度的影响后

通过对信号过零点的准确采样

计算出余弦信号相位滞后的角度值

进而确定了实际的相位计算公式。根据存在相位滞后信号的极性和幅值信息

对完整的短周期信号进行相位分段补偿

并分析了影响算法实现的各个因素。仿真实验表明

本算法可实现对相位滞后误差的实时补偿

有效降低信号相位不正交对细分精度的影响

使细分误差仅为未补偿误差的10%

极大地提高了莫尔条纹信号细分精度和位移检测精度。

Abstract

In order to eliminate the tangent subdivision error caused by nonorthogonal Moir fringe signals

a new algorithm is presented to compensate the real-time phase laggard error. After analyzing the effect of the phase nonorthogonality on subdivision precision

the cosine signal phase error is worked out based on sampling the signal with zero value well and the actual phase formula is determined clearly. According to the polarity and amplitude of the signal with laggard phases

the shorter periodic signals are compensated in a certain section phase respectively and the factors influencing the compensation precision are analyzed. Experimental data indicate that this algorithm can compensate the phase error perfectly and can depress the effect of the nonorthogonal signals on the subdivision precision. Obtained results show that the subdivision error by using the proposed method reduces to 10 percent of the original error and the subdivision and location precisions are improved greatly.

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references

吕孟军.光栅莫尔条纹电子学细分技术研究 . 南京航空航天大学,2008. LV M J. Study of Electronic Subdivision for Grating MoirFringe . Master Degree Thesis, Nanjing University of Aeronautics and Astronautics,2008. (in Chinese)[2] 王君立,李大一,刘琳. 莫尔条纹快速细分在光电轴角编码器中的应用[J]. 微细加工技术,2005,12(4):16-20. WANG J L, LI D Y, LIU L. Rapid subdivision Method of MoirFringe and Its Applications on the Photoelectric Rotary Encoders [J]. Microfabrication Technology,2005,12(4):16-20. (in Chinese)[3] 蔺小军,史耀耀,汪文虎,等. 光栅信号软件细分技术及其误差分析[J]. 工具技术,2006,40(10):72-74. WANG X J, SHI Y Y, WANG W H, et al.. Digital subdividing technique for grating signal and Its error analysis [J]. Instrument Technology , 2006,40(10):72-74. (in Chinese)[4] 徐洲,胡晓东,罗长洲,等. 增量式轴角编码器的电子细分及零位处理[J]. 光子学报,2002,31(12):1497-1500. XU ZH, HU X D, LUO CH ZH, et al.. The electronic multiplication and interpolation of incremental optical encoder with reference mark [J]. Acta Photonica Sinica, 2002,31(12):1497-1500. (in Chinese)[5] 朱应时,杨进堂. 圆光栅的高精度高质量莫尔条纹信号的研究[J]. 计量学报,1995,10(4):280-285. ZHU Y SH, YANG J T. Study of Moir Fringe Signals with High Accuracy and Superior Quality in Radial Gratings [J]. Acta Metrologica Sinica, 1995,10(4):280-285. (in Chinese)[6] 唐小琦,刘世峰,王平江,等. 正切法莫尔条纹信号幅值分割细分的误差分析[J]. 计量学报,2007,07(3):220-223. TANG X Q, LIU SH F, WANG P J, TANG Y Z, LUO C H. Error Analysis for Amplitude Segmenting Subdivision of MoirFringe [J]. Acta Metrologica Sinica, 2007,07(3):220-223. (in Chinese)[7] 罗华,高山,李翔龙. 粗光栅信号全数字化处理法实现高倍数细分[J]. 光学精密工程,2007,15(2):283-288. LUO H, GAO SH, LI X L. Realization of high division number of coarse grating signals by fully digital processing method[J]. Opt. Precision Eng.,2007,15(2):283-288(in Chinese)[8] 喻洪麟,黄良明,王远干. 莫尔条纹信号的DSP滤波及细分技术研究[J]. 光电工程,2004,9(9):61-65. YU H L, HUANG L M, WANG Y G. Study on DSP filter and subdivision of Moirfringes signal [J]. Opto-electronic Engineering, 2004,9(9):61-65. (in Chinese)[9] 楚兴春,吕海宝,杜列波,等. 任意相位差条纹信号细分方法的研究[J]. 光学学报,2005,257(4):498-500. CHU X CH, LV H B, DU L B, et al.. Research on subdividing method f or random phase difference fringe signals [J]. Acta Optica Sinica, 2005,257(4):498-500. (in Chinese)[10] 李江国,宣明,王一凡. 莫尔条纹细分中相位误差的软件补偿方法[J]. 光学精密工程,1995,3(1):69-73. LI J G, XUAN M, WANG Y F. Software compensation method of phase error in moirfringe division [J]. Optics and Precision Engineering, 1995,3(1):69-73. (in Chinese)[11] 熊文卓,孔智勇,张炜. 光电轴角编码器光电信号正交性偏差的相量校正方法[J]. 光学精密工程,2007,15(11):1745-1748. XIONG W ZH, KONG ZH Y, ZHANG W. Phase correction of quartering deviation of photoelectric rotary encoder [J]. Optics and Precision Engineering, 2007,15(11):1745-1748. (in Chinese)

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