MEMS工艺模拟与有限元软件接口的实现

简福建; 李伟华

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MEMS工艺模拟与有限元软件接口的实现

微纳技术与精密机械 | 更新时间：2020-08-12

- MEMS工艺模拟与有限元软件接口的实现
- Realization of interface between MEMS process simulation and finite element software
- 光学精密工程 2009年17卷第7期页码：1646-1650
- 作者机构：
  
  东南大学电子科学与工程系MEMS教育部重点实验室,江苏南京,210096
- 作者简介：
- 基金信息：
  
  Supported by the National Hi-Tech Research and Development Program of China(863 Prog
- DOI：
  中图分类号： {TP307}
- 收稿日期：2009-01-20，
  
  修回日期：2009-04-30，
  
  网络出版日期：2009-07-25，
  
  纸质出版日期：2009-07-25
- 稿件说明：
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简福建, 李伟华. MEMS工艺模拟与有限元软件接口的实现[J]. 光学精密工程, 2009,17(7): 1646-1650

JIAN Fu-jian, LI Wei-hua. Realization of interface between MEMS process simulation and finite element software[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1646-1650
简福建, 李伟华. MEMS工艺模拟与有限元软件接口的实现[J]. 光学精密工程, 2009,17(7): 1646-1650 DOI：

JIAN Fu-jian, LI Wei-hua. Realization of interface between MEMS process simulation and finite element software[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1646-1650 DOI：

摘要

微机电系统工艺模拟可在实际加工前预测MEMS器件的实际结构

有利于理解工艺机理

缩短设计周期

减少生产费用。针对目前用于MSMS器件分析的模拟软件尚不能很好地与有限元软件对接的问题

设计了工艺模拟软件与有限元分析软件的接口。通过这个接口

将MEMS工艺模拟所得到的数据经过数据格式的转换导入有限元分析软件(ANSYS)中并建模

使之可以进行诸如机械、热、电等物理参量的分析。在分析了目前关于(曲线)边界轮廓提取的各种方法后

引进了最大圈算法

解决了工艺模拟结果在有限元软件中的模型重构问题

实现了从工艺模拟到有限元分析的无缝对接。提出的接口设计对实现MEMS CAD体系化具有重要的促进作用。

Abstract

The process simulation for Micro-electric-mechanic Systems(MEMS) can be used in predicting the actual structure of a MEMS before processing

which contributes to understand processing properties

shorten design periods and to reduce production costs. Because the current simulation software for MEMS analysis can not be combined with a finite element software

this paper presents a interface named as ANDYD Parametric Design Language(APDL) to link the process simulation software and the finite element software. By proposed APDL

the results from MEMS process simulation are imported into the finite element software to establish a model

then it is used to analyze on mechanical

electrical and thermal parameters. Moreover

the largest circle algorithm is introduced the software to implement the model reconstruction for the process simulation in the finite element software after analysis on several kinds of boundary contour extraction methods

which completes an seamless linking from the process simulation to the finite element analysis(FEA). Experimental results prove that proposed interface design is conductive to the systematization of MEMS CAD technologies.

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references

STROJWAS A J,ZHU ZH R,CIPLIPCKAS D,et al..Layout manufacturability analysis using rigorous 3-D topography simulation[J].IEEE International Semiconductor Manufacturing Symposium,2001:263.[2] BUTTGENBACH S, THAN O. A 3D CAD tool for anisotropic ally etched silicon micro structures .IEEE/IEE http://intl.ieeexplore.ieee,org/xpls/VSearch.jsp,1996-03-11.[3] CAMPBELL S A. The Science and Engineering of Microelectronic Fabrication[M]. 2nd.ed.Publishing House of Electronics Industry, 2004:259-285.[4] FINCH N,HE Y,MARCHETTI J.General MEMS process physics simulation and its applications .Micromachining and Microfabrication Process Technology VI,Proc.SPIE,2000,4174:217-221.[5] ZHOU Z F, HUANG Q A, LI W H. Application of cellular automata method in process simulation of MEMS[J]. Journal of Transducer Technology, 2004, 23: 77-80.[6] MOAVENI S. Theory and application with ANSYS[M]. New Jersey: Prentice Hall, Upper Saddle River, 1999:528.[7] GUI M, DU W F. Parametric model for APDL in ANSYS[J]. MICROCOMPUTER APPLICATIONS, 2006,27(5):635-637.[8] CHEN G, YI H, NI ZH H. Engineering Interfaces for medical visualized system[J]. Journal of Data Acquisition & Processing,2006,21(2):239-244.

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