电液动力微泵微电极的不同制作工艺的比较

于翮; 张强; 乔大勇; 俞坚

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电液动力微泵微电极的不同制作工艺的比较

微纳技术与精密机械 | 更新时间：2020-08-12

- 电液动力微泵微电极的不同制作工艺的比较
- Comparison of different processes in making EHDmicropump electrode
- 光学精密工程 2009年17卷第7期页码：1635-1639
- 作者机构：
  
  1. 西北工业大学陕西省微纳米系统实验室,陕西西安,710072
  2. 北京工业大学传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室北京,100022
- 作者简介：
- 基金信息：
  
  Supported by the National Natural Science Foundation of China (Grant No.50676001)()
- DOI：
  中图分类号： TH38
- 收稿日期：2009-01-20，
  
  修回日期：2009-04-30，
  
  网络出版日期：2009-07-25，
  
  纸质出版日期：2009-07-25
- 稿件说明：
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于翮, 张强, 乔大勇, 俞坚. 电液动力微泵微电极的不同制作工艺的比较[J]. 光学精密工程, 2009,17(7): 1635-1639

YU He, ZHANG Qiang, QIAO Da-yong, YU Jian. Comparison of different processes in making EHDmicropump electrode[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1635-1639
于翮, 张强, 乔大勇, 俞坚. 电液动力微泵微电极的不同制作工艺的比较[J]. 光学精密工程, 2009,17(7): 1635-1639 DOI：

YU He, ZHANG Qiang, QIAO Da-yong, YU Jian. Comparison of different processes in making EHDmicropump electrode[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1635-1639 DOI：

摘要

基于MEMS加工技术的电液动力微泵在微流体冷却系统和解决高热流器件的冷却问题中占有重要地位。电液动力微泵的核心部分是通过MEMS加工工艺制作的由成对的发射极和集电极组成的微电极。在电极对间的强电场作用下

电介质流体中的离子、极子以及微粒同电场相互作用来驱动流体流动。本文系统地讨论了微电极在设计和制作中需要关注的问题:电极材料的选择方针

多种形状的电极设计和两种电极加工工艺电镀法和剥离法的对比。实验结果表明:贵金属有更好的抗电化腐蚀能力;同普通平行电极结构相比

带有尖锐结构的电极更能提高微泵的性能;相比电镀法

剥离法能更好地提高电极的制作质量。

Abstract

The fabrication and design of micro-electrodes(the key component of Electrohydrodynamic(EHD) micropump) using MEMS technology are studied in this paper. The main part of the EHD micropump is a planar electrode array composed of electrode pairs made of the emitter and the collector. The electrohydrodynamic (EHD) pump uses the interaction between an electric field and electric charges

dipoles or particles embedded in a dielectric fluid to drive the fluid. The major key-controlling variables including the selection of electrode materials

diversification of electrode geometrical design

comparison of different fabrication processes

electroplating and kit-off process are analyzed systematically.The experimental results show that noble metals have good performance of resistance for corrosion electrochemical processes

and the electrode with sharp geometry can improve the performance of micropump. It also shows that kit-off process is better than electroplating process in electrode quality.

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references

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