The design

modeling and simulation of a novel MEMS hybrid energy generator for multi-frequency vibration is presented to meet the requirements of portable and wireless electronic devices for collecting energy from the ambient environment. In this design

piezoelectric cantilever beams and capacitors are combined for harvesting the hybrid vibration energy. Then

an analytical model is established for the multi-frequency vibration energy harvesting system and a numerical simulation method is used to predict the power output by using a MatLab/SIMULINK. The result shows that the structure can work efficiently in the frequency ranges of 630-655 Hz

and the power output can reach about 13.46 μW with a load resistance of 50 kΩ. Based on the result

an optimized multi-frequency hybrid energy harvester is designed in this paper. In addition

the Finite Element Analysis (FEA) of the structure is carried out to prevent the structure failure. The work implemented by this paper shows that the next generation design with a wider frequency range and a higher power output within a smaller structure volume is expectant.