The change in resistivity caused by the mechanical deformation in a micro-accelerometer was used to design an accelerator to measure physical quantities such as high

g

acceleration. The process and a solid model were constructed in CoventorWare. With changing the position of a piezoresistive sensing element on the fix-end cantilever

the optimizing location of the sensing element as well as the relationship between the output current and the location are obtained by using Finite Element Mothod(FEM) in the MemPZR module. Changing the sensitivity by the same percentage

it is proved that electric conductivity changes are coincident with the sensitivity changes of the element. When 20 k

g

acceleration is inputted

the potential distribution of piezoresistor device terminals

the corresponding stresses of the piezoresistive element and the current location are also obtained

which testifies the anti-over loading ability from the stress location in the fix-end cantilever.