A new meshing method is introduced to obtain a hexahedral mesh for three dimension MEMS models. MEMS models are built from 2 dimensional masks according to a process sequence. In most of cases

it leads to layered geometries

whose faces are parallel to the

z

axis or the

(x

y)

plane. This paper describes a new algorithm to create two and a half dimension(2.5D) hexahedral meshes for these layered models. By the method

the quadrilateral meshs in the

(x

y)

plane are generated and hexahedral elements are created by extending these quadrangles along

z

axis. Compared with popular Sweeping algorithm

it is faster and simpler to generate a hexahedral mesh. The mesh size is the only parameter to input before meshing and it spends less than 10 s for the mesh with 10 000 hexahedron elements

which is 10 to 1 000 times faster than that of the Sweeping method. Meanwhile

it can generate a MEMS model according to fabrication processes

which creates an easy way from 2 dimensional mask to 3 dimensional mesh.