利用声表面波实现液体的二维驱动

高阳; 李以贵; 张俊峰

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利用声表面波实现液体的二维驱动

微纳技术与精密机械 | 更新时间：2020-08-12

- 利用声表面波实现液体的二维驱动
- Two-dimensional actuation of liquid using surface acoustic wave
- 光学精密工程 2009年17卷第7期页码：1548-1552
- 作者机构：
  
  上海交通大学微纳科学技术研究院薄膜与微细加工技术教育部重点实验室, 微米/纳米加工技术国家重点实验室上海,200240
- 作者简介：
- 基金信息：
  
  Supported by the National Natural Science Foundation of China (grant No. 60777016).()
- DOI：
  中图分类号： TB559
- 收稿日期：2009-01-20，
  
  修回日期：2009-04-30，
  
  网络出版日期：2009-07-25，
  
  纸质出版日期：2009-07-25
- 稿件说明：
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高阳, 李以贵, 张俊峰. 利用声表面波实现液体的二维驱动[J]. 光学精密工程, 2009,17(7): 1548-1552

GAO Yang, LI Yi-gui, ZHANG Jun-feng. Two-dimensional actuation of liquid using surface acoustic wave[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1548-1552
高阳, 李以贵, 张俊峰. 利用声表面波实现液体的二维驱动[J]. 光学精密工程, 2009,17(7): 1548-1552 DOI：

GAO Yang, LI Yi-gui, ZHANG Jun-feng. Two-dimensional actuation of liquid using surface acoustic wave[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1548-1552 DOI：

摘要

报道了利用声表面波实现水滴二维驱动的实验。在127.8

切

向传播的铌酸锂衬底上制作了4个叉指换能器。每个叉指换能器由10对电极构成

其叉指周期为400 m

宽度为100 m

孔径为12 mm

整个器件的尺寸为26 mm26 mm0.45 mm。由于铌酸锂晶体的各向异性

叉指换能器沿

Y、X

方向的谐振频率不同

分别为9.3 MHz 和9.6 MHz。基于铜材料相对于铝材料的优点

选用了铜材料并采用剥离工艺制作了电极

得到了优化的工艺参数。最后

用了超长时间超声波辅助方法彻底去除残胶

实现了对水滴的二维驱动

输入功率为9 W

液滴运动的平均速率为5 mm/s。利用ANSYS软件分析了声表面波在铌酸锂衬底内的传播

内部振动的模拟结果与理论分析一致。实验表明

利用声表面波实现液体的二维驱动是可行的

该液体驱动原型可用于片上系统和-TAS。

Abstract

This paper reports the two-dimensional actuation of a water drop by using a Surface Acoustic Wave(SAW). Four Interdigital Transducers (IDTs) is fabricated on a 127.8 rotated

-cut

-propagation LiNbO

substrate. Each IDT is composed of 10 strip electrode pairs

which is 400 m in pitch

100 m in electrode strip width and 12 mm in aperture. The overall size of the device is 26 mm26 mm0.45 mm. Due to the anisotropy of LiNbO

crystal

the resonance frequencies of IDTs are in 9.3 MHz along

axis and 9.6 MHz along

axis

respectively. Being superior in characteristics to alunimium

copper is used as the electrode material in fabrication process and the Lift-off process is adopted to fabricate electrodes

so that optimum process parameters are finally obtained. An ultra-long-time ultrasonic assistance is used to get rid of residues completely

finally

a two-dimensional actuation of the water drop is observed

which shows the input power is 9 W and the average speed is drop movement is 5 mm/s.The propagation of SAW in LiNbO

substrate is simulated with ANSYS

simulation result agrees well with the calculation of theoretical vibration amplitude in LiNbO

. This research demonstrates that the two-dimensional acuation of a liquid drop by using the SAW is feasible. This prototype of liquid actuation is promising in lab-on-chip and -TAS applications

关键词

Keywords

references

RAYLEIGH L. On waves propagating along the plane surface of an elastic solid . Proc. London Math.Soc., 1885,7: 4-11.[2] KURIBAYASHI M., KUROSAWA. State-of-the-art surface acoustic wave linear motor and its future applications [J]. Ultrasonics, 2000,38:15-19.[3] SHIGEMATSUA T. Sub-nanometer resolution stepping motion of surface acoustic wave motor . Proceedings of the 1st International Conference on Positioning Technology, Tokyo, Japan, ICPT, 2004:223-228. [4] KUROSAWA. Evaluation of a surface acoustic wave motor with a multi-contact-point slider [J]. Smart Mater., 1998,7:305-311.[5] SHOWKO S, YOSHIKAZU M, TOSHIHIKO U. Study on SAW streaming and its application to fluid devices. . Proceedings of the 10th Symposium on Ultrasonic Electronics, Tokyo , Japan, 1989:137-139.[6] FAN W, YU X F, XI L. Research on driving system and controlling means of PZT [J]. Opt. Precision Eng., 2007,15(3):368-371.(in Chinese)[7] LIU H D, ZhAO Y P. Thickness dependent electrical resistivity of ultrathin (<40nm) Cu films[J]. Thin Solid Films, 2001,6:151-156.[8] NAOMENKO N F. Application of exceptional wave theory to materials used in surface acoustic wave devices[J]. J.Appl.Phys.,1996,79:8936-8943.

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