A novel biochemcal sensor based on a highField Asymmetric Ion Mobility Spectrometry(FAIMS) theory is fabricated and characterized

which is mainly composed of an ionization source

a drift tube and a detector. By taking a VUV lamp as the ionization source and choosing an acetone with nitrogen (99.999%) as the carrier gas

the biochemical sensor works at ambient pressure.Moreover

two kinds of drift tubes consisting of two parallel plate electrodes are fabricated. One drift tube with the dimension of 25 mm×10 mm×1 mm is composed of two copper planar electrodes

the other with the dimension of 20 mm×10 mm×1.5 mm is fabricated by Micro ElectroMechanical System(MEMS ) technology. For the former

the gap between the two drift tubes is 1 mm and the electrical field is above 10 000 V/cm; but for the latter

the gap between MEMS drift tube is 1.5 mm and the electrical field is less than 10 000 V/cm

which can not separate the acctone. With a peakpeak of rectangular asymmetric waveform voltage up to 1 600 V

a frequency of 195.8 kHz

a duty cycle of 30% and a compenstaion voltage of -8.63 V

the acetone displacement is compensated and the sensor ability to separate ions is demonstrated by an experiment using the planar copper drift tube.