High resolution measurement of rotation Motion was achieved to get characteristic and dynamic parameters of MEMS resonator in every moment. The results of measurement gave important reference to improve MEMS performance and reliability. In this paper

for the motion image sequence of microstructures collected by stroboscopic imaging technology

a method based on combination of Radon transform and phase correlation was designed. The motion in Descartes coordinates can be transform to parameters of polar coordinates so that rotation motion is projected to displacement of parameters. The displacement can be measured by phase correlation method to realize subpixel motion measurement. Experimental results achieved that the power of resolution of rotation angle is superior to 0.01°. MEMS motion process is analyzed using the method. The offered solution indicate that the influence of distortion caused by rotation are deceased

and repetition of measurement is increased by always employing the method.