In order to enable electrode sites to get closer to target neurons

obtain a better stimulation and minimize the electrochemical erosion of electrode

we proposed dome-shaped flexible neural microelectrode arrays (MEAs) for neural applications. With the use of photosensitive polyimide (Durimide 7510) as substrate

a flexible microelectrode with 6 × 6 array of dome-shaped electrode sites was fabricated by combining photolithography and metal-patterning with electroplating process. Each electrode site has a diameter of 150 μm and a height of 50 μm. An evaluation of the dome-shaped electrode was also performed by simulation

SEM and resistance test. Experimental results showed

compared with conventional planar microelectrodes with the same base area

the 3D dome-shaped microelectrodes exhibited an 80% decrease in electrode impedance. The dome-shaped electrodes produce more uniform current distribution than the 3D pyramid-shaped microelectrodes do

which is helpful for its long-term safety of stimulation.