To improve the high temperature properties of touch mode capacitive pressure sensors

a Double-cave Touch Mode Capacitive Pressure Sensor (DTMCPS) is proposed and its overall performance in high temperature environment is analyzed significantly. Firstly

the theories of heat transfer and thermo-elasticity are deduced

and effects of many temperature dependence factors on thermal analysis of this sensor are described. Then

Finite Element Method and ANSYS software are used to simulate the thermal effect of the full dimension sensor during this analysis. The results indicate that the influence of temperature on the input (pressure load) and output (capacitance) characteristics is linear in a touch operation state of this DTMCPS

and its initial pressure of linear range reduces with temperature increasing. Furthermore

the sensitivity of double-cave structure sensor is 1.21×10-6 pF/Pa at 550 K

which has been 50% up on 0.8×10-6 pF/Pa of the traditional single-cave structure. These results show that this sensor has excellent high-temperature performance.