In order to realize the real-time control and detection of three-dimensional micro electrochemical milling process

a data acquistion and control system is established based on virtual instrument software Labwindows/CVI. The three-dimensional tool path generation and control strategy

data acquisition and anti-jamming algorithm and the machining time error compensation algorithm for the system are investigated. Firstly

the requirements of the control and detection system are analyzed according to the characteristics of micro electrochemical milling process and a high-precision experimental system for 3D micro electrochemical milling is buit up. Then

the feed control module for three-dimensional tool path is established based on a virtual instrument platform

and the optimization of tool path is discussed. Finally

the data acquisition and its feedback control module and the machining time error compensation function are introduced. On the basis of the system above

a three-step staircase structure with one stair of 15 μm × 55 μm × 15 μm is fabricated successfully. It shows that the system can meet the requirements of micro electrochemical milling for high machining precision

fast response

accuracy control and reliable and stable abilities.