Solar-blind uv induced transmission filters (SBU-ITF) fabricated by ion-beam sputtering were investigated. Firstly

solar-blind uv induced transmission filters (SBU-ITF) were designed and analyzed by theory

and the fabrication of ZrO2

SiO2 and Al film by ion beam sputtering were optimized. The optical constants of ZrO2 and SiO2 films were derived from the transmitting and reflecting spectrum. The optical constants of Al film was determined by the inversion of the variable incidence ellipsometer spectrum of sample JGS1/SiO2/Al/SiO2/air(SAS).On the base of the above research

the SBU-ITF were fabricated by using the three above films and the optical performance was measured. The measured transmittance of SBU-ITF show that

the peak transmittance at the 264nm center wavelength of transmittance of the filter was larger than 60%

the transmittance band width (FWHM) was about 13nm

the optical density in the 300-350nm cutoff spectral region was 2.6.The analyses of the transmittance show that the main factors limiting the performance of SBU-ITF included the slow deposition speed of Al film by ion-beam sputtering and the small amount of O2 content in the chamber during deposition of Al film.