In order to increase accuracy and reduce temperature drift

a micro-machined resonant pressure sensor based on electromagnetically driven H-type doubly-clamped lateral beams and differential detection is proposed in this paper. First

FEM analysis was carried out to guarantee the sensitivity and resolution of the sensor. Then based on the boron-diffusion self-stopped etch technique

the sensor samples were achieved by standard bulk MEMS process

which were of good uniformity. Finally

the vacuum package of the sensor was accomplished by adhesive bonding using non-photosensitive BCB (DVS-BCB-3022-46) and stress isolation. Experimental results indicate that the nonlinearity is lower than 0.02% in the range of 0~120kPa，with the accuracy 0.05% FS

and the temperature drift is less than 0.05%/℃ in the range of -40℃ to 70℃.