一种提高光栅莫尔条纹信号质量的新滤波方法

吴宏圣

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一种提高光栅莫尔条纹信号质量的新滤波方法

信息科学 | 更新时间：2020-08-12

- 一种提高光栅莫尔条纹信号质量的新滤波方法
- A new filtering method of improving quality of grating Moiré fringe
- 光学精密工程 2011年19卷第8期
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  吉林省科技厅项目()
- DOI：
  中图分类号：
- 收稿日期：2010-12-10，
  
  修回日期：2011-01-20，
  
  网络出版日期：2011-10-21，
  
  纸质出版日期：2011-08-25
- 稿件说明：
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吴宏圣. 一种提高光栅莫尔条纹信号质量的新滤波方法[J]. 光学精密工程, 2011, 19(8): 0-0.

WU Hong-Ku. A new filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0.
吴宏圣. 一种提高光栅莫尔条纹信号质量的新滤波方法[J]. 光学精密工程, 2011, 19(8): 0-0. DOI：

WU Hong-Ku. A new filtering method of improving quality of grating Moiré fringe[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0. DOI：

摘要

针对莫尔条纹信号的质量问题提出一种新滤波方法：相位差滤波法。将指示光栅上四场裂相方式中每场细分为多个不同相位的行组合，利用行组合间的不同相位排列关系，来消弱高次谐波的分量，从而提高莫尔条纹信号的质量。首先，介绍了莫尔条纹的傅立叶级数表达式。接着，对莫尔条纹的各次谐波特性进行了分析。然后，通过指示光栅的图案设计实例，来阐明该滤波方法是如何消除二次、三次和四次谐波的。最后，通过仿真和实验的方法，验证了该滤波方法对削弱高次谐波的有效性。实验结果表明：该滤波方法可将莫尔条纹信号的三次谐波削弱4.9%

在20μm内测量精度提高了0.5μm。该方法只是改变了指示光栅的刻划图案，不增加制造成本和体积，实用性强，易于工业生产。

Abstract

A new filtering method to improve the quality of grating Moiré fringe is presented in this paper

named phase-difference filtering.Each field of the 4 field scanning reticle is devided into multi-lines with different phases

which achieves the suppression of high harmonic generations. In this way the quality of Moiré fringe signal is improved. . Firstly the Fourier series expression of Moiré fringe is introduced and various harmonic generations of the Moiré fringe are analysised. Then

the filtering method eliminating the second

third and fourth harmonic generations is illustrated with the designed grating patterns. Finally

the valid of the method to inhibit the high harmonic generations is verified through simulations and experiments. Experimental results indicate that the third harmonic generation of the Moiré fringe signal can be reduced by 4.9% and the accuracy can be improved by 0.5μm with period of 20μm. This method has the benefits of effective

low cost

without increasing the system size and easy-to industrial production.

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Keywords

references

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