Micro-mirrors array is one of the most important devices in the Micro-Optical Electro Mechanical system (MOMES) field. It can be widely used in various macro optical areas

such as Optical communication

Adaptive optics

projection or imaging

etc. In order to obtain a micro-mirror array with large torsional angle and large size of micro-mirror under limited driving voltage

in this paper

we propose and demonstrate a novel MOEMS micro-mirror array with multi-terraced-plate structure. The difference characterization of electrostatic driver between the multi-terraced-plate structure and parallel-plate structure are analyzed. The multi-terraced-plate structure as a key fabrication process of micro-mirror array has been researched and a bulk Micro-mechanical technology is used for fabricating the Micro-mirror array. Micro-mirror size is 600 by 200μm

and contains 52 micromirror array with a high fill-factor in excess of 97% have been achieved. The test results show that the micro-mirror have a maximum torsional angle about 1.1 degrees with a 164v driving voltage. In contrast with the traditional Parallel-plate structure

the multi-terraced-plate structure can greatly reduce the driving voltage.