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中国科学院 长春光学精密机械与物理研究所,吉林 长春,130033
收稿日期:2011-01-27,
修回日期:2011-03-13,
网络出版日期:2011-10-21,
纸质出版日期:2011-08-25
移动端阅览
闫勇,金光. RB-SiC反射镜的制备及改性非球面加工[J]. 光学精密工程, 2011, 19(8): 0-0.
YAN Yong,JIN Guang. Preparation of RB-SiC blank and fabrication of its surface modification aspheric mirror[J]. Editorial Office of Optics and Precision Engineering, 2011, 19(8): 0-0.
为了解决RB-SiC反射镜工程实践中暴露的一些工程问题,缩短非球面加工周期,对RB-SiC反射镜材料的制备、表面改性及非球面加工等技术进行了分析研究。首先,依据其改性特殊性,选取了与RB-SiC反射镜材料热胀系数匹配的新型支撑材料进行热匹配设计。接着,依据实际工程情况对非球面加工工艺及流程进行了技术改进,以提高加工的可靠性,缩短加工周期。最后,采用试验的方法对RB-SiC反射镜的相关技术方法进行了试验验证。试验结果表明:改性后RB-SiC反射镜完好,改性前后镜面面形精度RMS值变化量仅为0.017λ(λ=623.8nm),变化率为13%,非球面加工周期缩短1月~2月。该技术方法确保了RB-SiC反射镜10μm的改性膜层在后续加工中的加工余量,使其不易被磨漏,提高了加工的安全性,缩短了非球面加工周期。该技术完全适用于其它SiC反射镜的制备及非球面加工。
In order to solve the engineering problems that exposed during the RB-SiC fabrication and shorten the processing cycle of aspheric
the RB-SiC mirror preparation
surface modification and aspheric processing techniques were analyzed. First
according the special modification characteristic of the RB-SiC mirror
the researchers chose a new material that its thermal expansion coefficient was matched very well to the RB-SiC thermal expansion coefficient. Then the modification and fabrication technology of RB-SiC were improved based on the actual situation of the aspheric processing in order to improve the reliability of the processing and shorten its processing cycle. Finally
the improved technology and methods were verified by the experiment. And the experimental results indicate that the modified RB-SiC mirror is in a good condition and RMS of the mirror surface modified before and after changed was only 0.017λ(λ=623.8nm)
13% rate of change and the aspheric processing time decreased 1 month or 2 months. The new technology ensured that adequate margin of the 10μm modified layer thickness in the subsequent processing and made the modified layer to be ground leakage difficultly. The security of the processing was improved and the processing cycle of aspheric was shortening in the engineering practice. The new technology can been applied to other SiC mirror preparation and processing of aspheric very well.
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