A TIS scatterometer is manufactured based on the theory of total integrated scattering for the engineering needs and it is used to evaluate the performance of the surface modification of silicon carbide mirror.The merits of this device include that the operation on it is very simple

convenient and rapid.It needn’t to touch the surface of the sample in the testing process thus there is no risk to destroy it.The analysis of the testing datas and the comparation to Lambda 900 spectrometer show that it is reasonable and effective to evaluate the performance of the surface modification by means of scattering characteristic and the testing results of the TIS scatterometer is exact and reliable.