In order to realize the miniaturized nano-positioning stage

a novel 2-DOF single crystal silicon (SCS) nano-positioning micro x-y stage with the function of displacement detection was successfully developed using silicon bulk machining

electrostatics comb actuator is used to drive x-y stage. The theory of electromechanical coupling and energy conservation are used to analyze electrostatic actuated mechanism

x-y stage static characteristic

and x-y stage dynamic characteristic. Some failure modes of x-y stage are also presented and the electromechanical side instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing

the initial finger overlap

and the spring stiffness ratio of the compliant suspension. Additionally

the effect of the air damping is taken into account during the analyzing the x-y stage dynamic characteristic

under which the maximum velocity and stable travel range are proposed.