Single chamber piezo-pump is limit applied in many fields because lack of self-priming and bubble-tolerant
it is an efficient way that adopt multi-chamber structure to enhance the performance of piezo-pump. The analysis result about changing process of volume and pressure of chamber shows that double-chamber serial piezo-pump only can be tandem driven
and double-chamber parallel piezo-pump only can be parallel driven respectively. The experiment results indicate that the maximum flow of double-chamber serial pump is 1150ml/min (sine wave voltage is of 200v
frequency is of 152Hz) and that of double-chamber parallel pump is 640ml/min (sine wave voltage is of 140v
frequency is of 220Hz)
and the efficiency and performance is enhanced as chamber in tandem structure.