数字微流控芯片半月形驱动电极的设计

许晓威; 陈立国; 贺文元; 陈涛; 孙立宁

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数字微流控芯片半月形驱动电极的设计

微纳技术与精密机械 | 更新时间：2020-08-13

- 数字微流控芯片半月形驱动电极的设计
- Design of crescent driving electrode for digital electrowetting-on-dielectric device
- 光学精密工程 2014年22卷第3期页码：633-640
- 作者机构：
  
  苏州大学机器人与微系统研究中心,江苏苏州,215021
- 作者简介：
- 基金信息：
  
  国家自然科学基金(No.51275327)()
- DOI：
  中图分类号： O442
- 纸质出版日期：2014-03-25
- 稿件说明：
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许晓威,陈立国,贺文元等. 数字微流控芯片半月形驱动电极的设计[J]. 光学精密工程, 2014,22(3): 633-640

XU Xiao-wei, CHEN Li-guo, HE Wen-yuan etc. Design of crescent driving electrode for digital electrowetting-on-dielectric device[J]. Editorial Office of Optics and Precision Engineering, 2014,22(3): 633-640
许晓威,陈立国,贺文元等. 数字微流控芯片半月形驱动电极的设计[J]. 光学精密工程, 2014,22(3): 633-640 DOI：

XU Xiao-wei, CHEN Li-guo, HE Wen-yuan etc. Design of crescent driving electrode for digital electrowetting-on-dielectric device[J]. Editorial Office of Optics and Precision Engineering, 2014,22(3): 633-640 DOI：

摘要

为了降低数字微流控芯片的驱动电压

将传统的方形驱动电极结构设计为半月形

研究了不同尺寸参数的半月形驱动电极降低驱动电压的效果。首先

根据介电湿润的基本原理分析了不同驱动电极形状对降低驱动电压的影响。接着

通过VOF法对液滴的运动过程进行建模和数值仿真。然后

根据数值仿真结果对比分析了不同结构参数时的半月形驱动电极随驱动时间的运动过程。最后

通过所研制的具有代表性的四种不同结构参数的半月形驱动电极芯片对驱动液滴的效果进行试验验证。实验结果表明:本文所制作的具有代表性的四种半月形驱动电极微流控芯片中

电极圆弧直径等于电极长度时的结构设计芯片能够比其他3种电极结构的芯片至少降低驱动电压15.6%

芯片降低驱动电压的效果最明显

而且可以在16 V的驱动电压下使1 μL去离子水液滴的运动速度达到1.6 cm/s

所以该尺寸设计为半月形驱动电极中的最优设计。得到的实验数据证明了半月形驱动电极微流控芯片中当电极圆弧直径等于电极长度时的电极结构设计降低芯片驱动电压的有效性。

Abstract

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references

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