基于光学自准直法的光波导阵列平行度测试

黄银国; 梁佳琪; 杨永; 李杏华

doi:10.37188/OPE.20202807.1415

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基于光学自准直法的光波导阵列平行度测试

现代应用光学 | 更新时间：2020-08-13

- 基于光学自准直法的光波导阵列平行度测试
- Parallelism measurement of geometric waveguide array based on autocollimation
- 光学精密工程 2020年28卷第7期页码：1415-1423
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室, 天津 300072
- 作者简介：
  
  [ "黄银国(1978-), 男, 江西九江人, 副教授, 2010年于天津大学获得博士学位, 主要从事光电传感技术的研究。E-mail:hyg@tju.edu.cn" ]
  李杏华(1976-), 男, 江西南昌人, 副教授, 主要从事光电传感技术以及几何量误差分析及测量的研究。E-mail:lixinghua@tju.edu.cn LI Xing,E-mail:lixinghua@tju.edu.cn
- 基金信息：
  
  航空科学基金资助项目(No.20175748009)
- DOI：10.37188/OPE.20202807.1415
  中图分类号： TH712
- 收稿日期：2020-04-16，
  
  修回日期：2020-05-07，
  
  录用日期：2020-5-7，
  
  纸质出版日期：2020-07-15
- 稿件说明：
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黄银国, 梁佳琪, 杨永, 等. 基于光学自准直法的光波导阵列平行度测试[J]. 光学精密工程, 2020,28(7):1415-1423.

Yin-guo HUANG, Jia-qi LIANG, Yong YANG, et al. Parallelism measurement of geometric waveguide array based on autocollimation[J]. Optics and precision engineering, 2020, 28(7): 1415-1423.
黄银国, 梁佳琪, 杨永, 等. 基于光学自准直法的光波导阵列平行度测试[J]. 光学精密工程, 2020,28(7):1415-1423. DOI： 10.37188/OPE.20202807.1415.

Yin-guo HUANG, Jia-qi LIANG, Yong YANG, et al. Parallelism measurement of geometric waveguide array based on autocollimation[J]. Optics and precision engineering, 2020, 28(7): 1415-1423. DOI： 10.37188/OPE.20202807.1415.

摘要

为了提高几何光波导的成像质量，提出了一种基于离轴自准直光路的光波导阵列平行度测试方法。根据阵列平面特征分析了以空间二维角度表征光波导中半透半反膜阵列平行度的误差评定模型，将几何光波导成像原理与自准直光路相结合，推算出了阵列平行度的数学关系式。然后，构建了光波导阵列平行度测量系统，系统中具有光源控制器可以控制输出光强，有效解决了因光波导中不同半透半反膜的光能利用率不同而影响测量的难题。利用Steger算法对自准直回像进行图像处理。最后，完成了标定和阵列平行度测试以及验证实验。实验结果表明，平行度测量系统的测量不确定度为1.14″，最大重复性误差为0.32″。该方法可以快速准确地测量几何光波导中的阵列平行度，对光波导阵列面的姿态修正以及成像质量的提高具有指导意义。

Abstract

To improve the imaging quality of the geometric waveguide

a method of measuring the parallelism of the waveguide array based on the off-axis autocollimation optical path was proposed. In this study

the error evaluation model of the parallelism of the semi-transparent and semi-reflective film array in the waveguide was analyzed according to the characteristics of the array plane. Combining the imaging principle of the geometric waveguide with the autocollimation optical path

the mathematical relationship of the array parallelism was deduced. Further

the parallelism measurement system of the waveguide array was developed. The system utilized a light source controller to control the output light intensity

which prevented the measurement from being affected by the light energy utilization of different semi-transparent and semi-reflective films in the waveguide. Subsequently

the Steger algorithm was used to process the autocollimation image. Finally

the calibration

array parallelism

and verification experiments were conducted. The experimental results show that the measurement uncertainty of the parallelism measurement system is 1.14″

and the maximum repeatability error is 0.32″. The proposed method can quickly and accurately measure the parallelism of the geometric waveguide array

which is of guiding significance to the attitude correction of the waveguide array and imaging quality improvement.

关键词

Keywords

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