声表面波紫外光探测器的研究进展

殷长帅; 周剑; 刘翊; 吴建辉; 熊硕; 段辉高

doi:10.37188/OPE.20202807.1433

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声表面波紫外光探测器的研究进展

现代应用光学 | 更新时间：2020-08-13

- 声表面波紫外光探测器的研究进展
- Research progress of surface acoustic wave ultraviolet detectors
- 光学精密工程 2020年28卷第7期页码：1433-1445
- 作者机构：
  
  1.湖南大学机械与运载工程学院汽车车身设计与制造国家重点实验室, 湖南长沙 410082
  2.国家先进轨道交通装备创新中心, 湖南株洲 412000
- 作者简介：
  
  [ "殷长帅(1996-), 男, 湖北孝感人, 硕士研究生, 2019年于三峡大学获得学士学位, 主要从事声表面波光电探测的研究。E-mail:yin.CS@foxmail.com" ]
  周剑(1988-), 男, 湖南长沙人, 副教授, 硕士生导师, 主要从事声表面波传感器、人工智能传感器及柔性电子器件的研究。 ZHOU Jian,E-mail:jianzhou@hnu.edu.cn
- 基金信息：
  
  湖南省重点研发项目(No.2019GK2111);湖南省重点研发项目(No.2018GK2044)
- DOI：10.37188/OPE.20202807.1433
  中图分类号： TN23
- 收稿日期：2019-11-04，
  
  修回日期：2020-01-15，
  
  录用日期：2020-1-15，
  
  纸质出版日期：2020-07-15
- 稿件说明：
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殷长帅, 周剑, 刘翊, 等. 声表面波紫外光探测器的研究进展[J]. 光学精密工程, 2020,28(7):1433-1445.

Chang-shuai YIN, Jian ZHOU, Yi LIU, et al. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and precision engineering, 2020, 28(7): 1433-1445.
殷长帅, 周剑, 刘翊, 等. 声表面波紫外光探测器的研究进展[J]. 光学精密工程, 2020,28(7):1433-1445. DOI： 10.37188/OPE.20202807.1433.

Chang-shuai YIN, Jian ZHOU, Yi LIU, et al. Research progress of surface acoustic wave ultraviolet detectors[J]. Optics and precision engineering, 2020, 28(7): 1433-1445. DOI： 10.37188/OPE.20202807.1433.

摘要

基于声表面波技术的紫外探测器具有响应速度快、灵敏度高、制作简单且可以无线无源监测等众多优势，成为近年来紫外探测领域的研究热点。本文根据紫外敏感薄膜分类综述了声表面波紫外探测的研究进展，剖析了声表面波紫外探测敏感机理，阐述了氮化镓、掺杂氮化镓、氧化锌、掺杂氧化锌、纳米结构氧化锌，氮化铝等敏感膜的材料特点、制备加工及其紫外探测器性能等。分析了近年来新型声表面波紫外传感器的研究状况，展望了声表面波紫外探测的未来发展趋势与挑战。

Abstract

Ultraviolet (UV) detectors based on the Surface Acoustic Wave (SAW) technology have become an active field of research owing to their advantages such as fast response

high sensitivity

simple fabrication

and wireless passive monitoring. In this study

the progress in the research of SAW UV detection

based on the classification of UV-sensitive films

was reviewed. The sensitive mechanism of SAW UV detection was analyzed and the characteristics

preparations

and UV performances of gallium nitride

doped gallium nitride

zinc oxide

doped zinc oxide

nanostructured zinc oxide

aluminum nitride

and other sensitive membrane materials were presented. This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges.

关键词

Keywords

references

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