模板微电铸工艺制备金字塔形镍纳米尖

胡亚明; 梁军生; 杨金鹤; 王大志; 王立鼎

doi:10.37188/OPE.20202807.1500

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模板微电铸工艺制备金字塔形镍纳米尖

微纳技术与精密机械 | 更新时间：2020-08-13

- 模板微电铸工艺制备金字塔形镍纳米尖
- Preparation of pyramidal Ni nano-tips using template-microelectroforming technique
- 光学精密工程 2020年28卷第7期页码：1500-1509
- 作者机构：
  
  1.大连理工大学辽宁省微纳米技术及系统重点实验室, 辽宁大连 116024
  2.大连理工大学精密与特种加工技术教育部重点实验室, 辽宁大连 116024
  3.海信新研发中心, 山东青岛 266100
- 作者简介：
  
  [ "胡亚明(1993-), 男, 河南商丘人, 硕士研究生, 2016年于沈阳工业大学获得学士学位, 主要从事微纳针尖及脉冲电射流打印喷头制备工艺的研究。E-mail:huym666@dlut.edu.cn" ]
  梁军生(1973-), 男, 广西桂林人, 博士, 研究员, 博士生导师, 1995年于合肥工业大学获得学士学位, 2003年于桂林电子科技大学获得硕士学位, 2007年于大连理工大学获得博士学位, 主要从事微纳米制造与器件、微纳机电系统的研究。E-mail:jsliang@dlut.edu.cnLIANG Jun-sheng, E-mail: jsliang@dlut.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51675085);大连市科技创新基金资助项目(2019JRGX042)
- DOI：10.37188/OPE.20202807.1500
  中图分类号： TN205;TN305.7
- 收稿日期：2019-12-12，
  
  修回日期：2020-02-06，
  
  录用日期：2020-2-6，
  
  纸质出版日期：2020-07-15
- 稿件说明：
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胡亚明, 梁军生, 杨金鹤, 等. 模板微电铸工艺制备金字塔形镍纳米尖[J]. 光学精密工程, 2020,28(7):1500-1509.

Ya-ming HU, Jun-sheng LIANG, Jin-he YANG, et al. Preparation of pyramidal Ni nano-tips using template-microelectroforming technique[J]. Optics and precision engineering, 2020, 28(7): 1500-1509.
胡亚明, 梁军生, 杨金鹤, 等. 模板微电铸工艺制备金字塔形镍纳米尖[J]. 光学精密工程, 2020,28(7):1500-1509. DOI： 10.37188/OPE.20202807.1500.

Ya-ming HU, Jun-sheng LIANG, Jin-he YANG, et al. Preparation of pyramidal Ni nano-tips using template-microelectroforming technique[J]. Optics and precision engineering, 2020, 28(7): 1500-1509. DOI： 10.37188/OPE.20202807.1500.

摘要

为了获得可靠的金属纳米尖的制作方法，设计了基于模板微电铸工艺制备金字塔型纳米Ni尖的工艺流程并进行了实验验证。利用（100）型单晶硅的各向异性腐蚀特性在40%的KOH溶液中腐蚀以制备倒金字塔型的硅模具，采用磁控溅射与正胶剥离工艺获得了厚度为200 nm的Ni种子层薄膜并进行金属图形化，之后进行微电铸实验，最后，利用KOH腐蚀硅模具以释放金字塔型实体Ni纳米尖。实验结果表明：利用ICP干法刻蚀代替HF酸腐蚀SiO

掩蔽窗口，可将模具制作的相对误差降低约9%；金字塔型Ni纳米尖的底部边长尺寸约为140

m，纳米尖最小曲率半径为54 nm；微电铸工艺复制精度约为99%。采用微电铸工艺并结合硅片自停止刻蚀技术，能够稳定可靠地制备出金字塔型Ni纳米尖，实现了金属纳米尖的批量化制备，从而降低了制造成本，为纳米尖的广泛应用奠定了基础。

Abstract

In order to obtain a reliable method for the fabrication of nanometer metal tips

the fabrication process for pyramidal Ni tips based on microelectroforming technology was designed and verified experimentally. First

silicon templates with inverted pyramidal pits were fabricated on (100) single crystal silicon wafers using anisotropic etching. Then

a 200 nm thick Ni thin film as seed layer was deposited onto the templates by magnetron sputtering combined with lift-off technology

followed by a Ni microelectroforming step. Finally

the pyramidal Ni nanotips were released by etching the silicon template in KOH solution. The results show that the relative error of square etch-windows on the silicon templates can be reduced by approximately 9% using inductively-coupled plasma dry etching instead of hydrofluoric acid etching in the patterning of the SiO

etch-windows. The bottom side length of the pyramidal Ni nanotip is approximately 140

and the smallest radius of curvature of the nanotips is 54 nm. The replication accuracy from the templates to the nanotips reached as high as 99%. The results show that the template microelectroforming technique can be used to achieve stable and mass fabrication of Ni nanotips

which reduces the cost and lays a solid foundation for the application of metal nanotips.

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