球面栅网几何要素的精密测量

王建; 李飞; 刘柳萍

doi:10.37188/OPE.20202809.1939

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球面栅网几何要素的精密测量

现代应用光学 | 更新时间：2020-09-28

- 球面栅网几何要素的精密测量
- Precision measurement of spherical grid geometrical features
- 光学精密工程 2020年28卷第9期页码：1939-1949
- 作者机构：
  
  1.中国科学院空天信息创新研究院, 北京 100407
  2.中国科学院高功率微波源与技术国防科技创新重点实验室, 北京 101407
- 作者简介：
  
  王建(1989-), 男, 天津人, 硕士, 助理研究员, 2012年、2015年于南京理工大学分别获得学士、硕士学位, 主要从事空间行波管制造工艺方面的研究。E-mail:wjnust@163.comWANG Jian, E-mail: wjnust@163.com
  [ "李飞(1981-), 男, 内蒙古鄂尔多斯人, 博士, 副研究员, 2008年于北京理工大学获得硕士学位, 2012年于中国科学院电子学研究所获得博士学位, 主要从事高波段行波管及新型器件的研究。E-mail:lifei_00912@126.com" ]
- 基金信息：
  
  中国科学院电子学研究所优秀青年人才计划资助项目(Y5Z0230239)
- DOI：10.37188/OPE.20202809.1939
  中图分类号： TN124
- 收稿日期：2019-10-16，
  
  修回日期：2019-11-22，
  
  录用日期：2019-11-22，
  
  纸质出版日期：2020-09-25
- 稿件说明：
移动端阅览
王建, 李飞, 刘柳萍. 球面栅网几何要素的精密测量[J]. 光学精密工程, 2020,28(9):1939-1949.

Jian WANG, Fei LI, Liu-ping LIU. Precision measurement of spherical grid geometrical features[J]. Optics and precision engineering, 2020, 28(9): 1939-1949.
王建, 李飞, 刘柳萍. 球面栅网几何要素的精密测量[J]. 光学精密工程, 2020,28(9):1939-1949. DOI： 10.37188/OPE.20202809.1939.

Jian WANG, Fei LI, Liu-ping LIU. Precision measurement of spherical grid geometrical features[J]. Optics and precision engineering, 2020, 28(9): 1939-1949. DOI： 10.37188/OPE.20202809.1939.

摘要

为了实现球面栅网零件几何要素的精密测量，快速筛选出满足电子光学设计要求的合格零件。对测量设备与附件的特点、零件的设计要求、加工工艺带来的常见超差问题进行研究。根据零件的测量要素，从测量效率和精度的角度考虑，选择了加装激光辅助对焦系统的影像测量仪。编写了自动测量程序，自动将粗定位定向转为精准定位定向，完成了零件全部几何要素的自动测量。针对“大半径、小圆弧”的测量难点，进行了量化分析和计算，得出了曲率半径测量结果不确定度的计算公式。最后，讨论了测量不确定度的来源，提出了抑制各误差源的方法。实际应用时，利用上述影像仪完成了栅网零件的曲率半径SR、栅网球面的面轮廓度、环向栅丝同心度、径向栅丝圆分度

、全部栅丝宽度

和

、端面外径及其圆度、端面平面度的自动精密测量。测量时间约为传统方式的2/3，测点数量达2 094个，远高于手动测量方式。

Abstract

This study aimed to achieve precise measurements for spherical grid geometrical features and screen the qualified parts for electron optical design requirements. Thus

the characteristics of the measuring equipment

its accessories

grid size design requirements

and common overproof problems caused by processing were studied. First

the optical measuring machine with a laser-assisted focusing system was selected

owing to its grid measurement features

efficiency

and accuracy. Then

an automatic measurement program was compiled

which automatically turned the coarse zero and orientation to the precise values and completed the automatic measurement of all the spherical grid geometrical features. Subsequently

in view of the 'big radius

small arc' measurement difficulty

quantitative analysis and calculations were performed to obtain the formula for the uncertainty of the curvature radius measurement. Finally

the sources of measurement uncertainty were discussed

and the methods for eliminating error sources were analyzed. In a practical application

the automatic and precise measurements of the spherical grid curvature radius

profile of the grid's spherical surface

circular grating wire concentricity

radial grating wire circle indexing

grating wire widths

outer diameter and its roundness

and the end surface flatness have been achieved. The measurement duration was approximately two thirds of the traditional method

and the number of measuring points was up to 2 094

which is considerably larger than the hand-operated method.

关键词

Keywords

references

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