高精度微结构玻璃光学元件阵列模压技术研究进展

舒成松; 董浩; 尹韶辉; 大和紀雄; 李四清

doi:10.37188/OPE.20202809.1967

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高精度微结构玻璃光学元件阵列模压技术研究进展

微纳技术与精密机械 | 更新时间：2020-09-28

- 高精度微结构玻璃光学元件阵列模压技术研究进展
- Research progress of high precision micro structure glass optical element array molding technology
- 光学精密工程 2020年28卷第9期页码：1967-1985
- 作者机构：
  
  1.湖南大学国家高效磨削工程技术研究中心, 湖南长沙 410082
  2.住田光学(东莞)有限公司, 广州东莞 523397
  3.湖南长步道光学有限公司, 湖南长沙 410082
- 作者简介：
  
  [ "舒成松(1992-), 男, 贵州毕节人, 博士研究生, 2015年、2019年于贵州大学分别获得学士、硕士学位, 主要从事光学玻璃模压工艺及模具超精密加工方面的研究。E-mail:csshu@hnu.edu.cn" ]
  尹韶辉(1967-), 男, 湖南湘潭人, 博士, 教授, 1987年于郑州轻工业大学获得学士学位, 1990年于华中科技大学获得硕士学位, 2002年于日本宇都宫大学获得博士学位, 主要从事从事超精密加工、非球面光学制造领域的研究。E-mail:yinshaohui@hnu.edu.cn YIN Shao-hui, E-mail:yinshaohui@hnu.edu.cn
- 基金信息：
  
  国家重点研发计划资助项目(2017YFE0116900)
- DOI：10.37188/OPE.20202809.1967
  中图分类号： TB133
- 收稿日期：2020-03-17，
  
  修回日期：2020-04-07，
  
  录用日期：2020-4-7，
  
  纸质出版日期：2020-09-25
- 稿件说明：
移动端阅览
舒成松, 董浩, 尹韶辉, 等. 高精度微结构玻璃光学元件阵列模压技术研究进展[J]. 光学精密工程, 2020,28(9):1967-1985.

Cheng-song SHU, Hao DONG, Shao-hui YIN, et al. Research progress of high precision micro structure glass optical element array molding technology[J]. Optics and precision engineering, 2020, 28(9): 1967-1985.
舒成松, 董浩, 尹韶辉, 等. 高精度微结构玻璃光学元件阵列模压技术研究进展[J]. 光学精密工程, 2020,28(9):1967-1985. DOI： 10.37188/OPE.20202809.1967.

Cheng-song SHU, Hao DONG, Shao-hui YIN, et al. Research progress of high precision micro structure glass optical element array molding technology[J]. Optics and precision engineering, 2020, 28(9): 1967-1985. DOI： 10.37188/OPE.20202809.1967.

摘要

高精度微结构玻璃光学元件在光学系统、精密测量、微流控芯片等领域的应用日趋广泛，而阵列模压成形技术是生产玻璃光学元件最具革命性的制造技术，具有高精度、无污染、净成形、低成本等特点，可望实现高精度微结构玻璃元件的低成本和稳定性量产。本文介绍了微结构玻璃光学元件阵列模压技术的优势及应用需求，综述了国内外近年来利用阵列模压技术制造微结构玻璃光学元件的重要研究进展，包括模具材料及加工技术、玻璃材料及热力学特性、阵列模压过程有限元仿真及模压工艺试验、微结构玻璃元件质量检测技术等。重点阐述了微结构光学元件制备过程中在模具材料、镀膜材料、模具加工设备及工艺、阵列模压仿真与成形工艺等方面所取得的新成果和面临的技术难题。最后，对微结构玻璃光学元件阵列模压成形制造技术的发展趋势进行了展望。

Abstract

High-precision microstructure glass optical elements are widely used in several applications

including optical systems

precision measurements

and microfluidic chips. The most revolutionary technique for the production of glass optical elements is the use of array molding technology

which is capable of high precision

net forming

and low-cost manufacturing in addition to being pollution free. This technique is also expected to achieve stable mass production of high-precision microstructure glass elements at low costs. In this paper

the advantages and application requirements of the array molding technology for microstructure glass optical elements are introduced. Moreover

global research developments in the manufacturing of microstructure glass optical elements using array molding technology are summarized. Recent progress includes research on mold material and processing technology

glass material and thermodynamic characteristics

finite element simulation

molding process test in the array molding process

and quality of the microstructure glass element detection technology. Novel achievements and technical problems in the manufacturing process are described

primarily focusing on the die material

coating material

die processing equipment and technology

array molding simulation

and forming technology. Finally

future developments in array molding manufacturing technology for microstructure glass optical elements are considered.

关键词

Keywords

references

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