皮秒光纤-固体混合放大紫外激光器

苏鑫; 姚吉; 王禹凝; 杨祥辉; 郑权

doi:10.37188/OPE.20202810.2122

您当前的位置：

首页 >

文章列表页 >

皮秒光纤-固体混合放大紫外激光器

现代应用光学 | 更新时间：2020-11-16

- 皮秒光纤-固体混合放大紫外激光器
- Ultra-violet picosecond fiber-solid hybrid amplification laser
- 光学精密工程 2020年28卷第10期页码：2122-2128
- 作者机构：
  
  1.长春新产业光电技术有限公司, 吉林长春 130103
  2.中国科学院大学, 北京 100049
  3.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
- 作者简介：
  
  [ "苏鑫(1991-), 男, 吉林长春人, 学士, 助理工程师, 2014年于长春理工大学获得学士学位, 主要从事皮秒激光技术、非线性频率变换技术、全固态大能量脉冲激光器的研究。E-mail:suxin@cnilaser.com" ]
  [ "姚吉(1991-), 男, 吉林长春人, 博士研究生, 主要从事固体激光及变频技术的研究。E-mail:yaoji6152938@163.com" ]
- 基金信息：
  
  吉林省科技发展计划资助项目(20170203013GX)
- DOI：10.37188/OPE.20202810.2122
  中图分类号： TN248
- 收稿日期：2020-06-08，
  
  修回日期：2020-07-10，
  
  录用日期：2020-7-10，
  
  纸质出版日期：2020-10-25
- 稿件说明：
移动端阅览
苏鑫, 姚吉, 王禹凝, 等. 皮秒光纤-固体混合放大紫外激光器[J]. 光学精密工程, 2020,28(10):2122-2128.

Xin SU, Ji YAO, Yu-ning WANG, et al. Ultra-violet picosecond fiber-solid hybrid amplification laser[J]. Optics and precision engineering, 2020, 28(10): 2122-2128.
苏鑫, 姚吉, 王禹凝, 等. 皮秒光纤-固体混合放大紫外激光器[J]. 光学精密工程, 2020,28(10):2122-2128. DOI： 10.37188/OPE.20202810.2122.

Xin SU, Ji YAO, Yu-ning WANG, et al. Ultra-violet picosecond fiber-solid hybrid amplification laser[J]. Optics and precision engineering, 2020, 28(10): 2122-2128. DOI： 10.37188/OPE.20202810.2122.

摘要

脉冲宽度为皮秒级的紫外激光，拥有极窄的脉冲宽度，可在短时间内破坏物质的分子键，缩短了与物质相互作用的时间，同时具有较强的时间分辨率。为了获得皮秒级脉冲宽度的短波紫外激光，本文设计了一种皮秒光纤-固体混合放大213 nm激光器。采用重复频率为5 MHz、脉冲宽度为52 ps、平均功率为2.5 W的1 064 nm光纤激光器作为种子源，经过两级端面泵浦的Nd：YVO

晶体组成的放大器对种子光进行放大，得到了平均功率为10.5 W的1 064 nm基频光输出。再将混合放大后得到的基频光及其四倍频后获得的266 nm激光在BBO晶体内进行和频，最终输出213 nm紫外激光。混合放大后获得的基频光经过多级非线性转换，最终输出脉冲宽度为690 ps、平均功率为61 mW的213 nm紫外激光，非线性转换效率达到0.58%。

Abstract

Ultraviolet lasers with picosecond pulse widths can quickly break the molecular bonds of materials

reducing interaction time. At the same time

they have high temporal resolution. In order to obtain an ultraviolet laser with a picosecond pulse width

a solid fiber

hybrid-amplified 213 nm laser was designed. First

a 1 064 nm fiber laser with a repetition rate of 5 MHz

pulse width of 52 ps

and average power of 2.5 W was used as a seed source. After two stages of end pumped Nd:YVO

crystal amplification

a 1 064 nm laser with an average power of 10.5 W was obtained.This 1 064 nm laser and a 266 nm laser were then combined in a BBO crystal to produce a 213 nm UV laser.The final output is a 213 nm UV laser with a pulse width of 690 ps and an average power of 61 mW. The nonlinear conversion efficiency is 0.58%.

关键词

Keywords

references

申高 , 檀慧明 , 刘飞 . 全固态355nm连续紫外激光器的优化设计 . 光学精密工程 , 2006 . 14 ( 5 ): 731 - 735 . http://ope.lightpublishing.cn/thesisDetails?columnId=1736483&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1736483&Fpath=&index=-1&l=zh .

G SHEN , H M TAN , F LIU . Optimization design for all-solid-sate 355 nm continuous-wave ultraviolet laser . Opt. Precision Eng. , 2006 . 14 ( 5 ): 731 - 735 . http://ope.lightpublishing.cn/thesisDetails?columnId=1736483&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1736483&Fpath=&index=-1&l=zh .

毛小洁 . 高功率皮秒紫外激光器新进展 . 中国光学 , 2015 . 8 ( 2 ): 182 - 190 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502002 .

X J MAO . New progress in high-power picosecond ultraviolet laser . Chinese Journal of Optics , 2015 . 8 ( 2 ): 182 - 190 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zggxyyygxwz201502002 .

冯国旭 , 黄来玉 , 秘国江 , 等 . 紧凑型高峰值功率高光束质量百皮秒激光器技术 . 激光与红外 , 2019 . 49 ( 12 ): 1421 - 1424 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201912005 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201912005 .

G X FENG , L Y HUANG , G J BI , 等 . Compact high peak power and high beam quality laser with hundreds picoseconds pulse width . Laser & Infrared , 2019 . 49 ( 12 ): 1421 - 1424 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201912005 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201912005 .

张永生 , 郑国鑫 . 500 fs紫外激光系统及其在闪烁体荧光特性测试中的应用 . 光学精密工程 , 2011 . 19 ( 2 ): 475 - 481 . http://ope.lightpublishing.cn/thesisDetails?columnId=1755404&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1755404&Fpath=&index=-1&l=zh .

Y SH ZHANG , G X ZHENG . 500 fs UV laser system and its application to fluorescence test of thin film scintillators . Opt. Precision Eng. , 2011 . 19 ( 2 ): 475 - 481 . http://ope.lightpublishing.cn/thesisDetails?columnId=1755404&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1755404&Fpath=&index=-1&l=zh .

ORTMANN U, DERTINGER T, WAHL M, et al .. Compact TCSPC upgrade package for laser scanning microscopes based on 375- to 470-nm picosecond diode lasers[C]. Biomedical Optics 2004. Proc SPIE 5325, Optical Diagnostics and Sensing IV , San Jose , CA , USA . 2004, 5325: 179-186.

李平雪 , 辛承聪 , 高健 , 等 . 皮秒激光加工研究进展与展望 . 激光与红外 , 2018 . 48 ( 10 ): 1195 - 1203 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201810002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201810002 .

P X LI , CH C XIN , J GAO , 等 . Research progress and development of picosecond laser processing . Laser & Infrared , 2018 . 48 ( 10 ): 1195 - 1203 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201810002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgyhw201810002 .

X L YAN , R J CHEN , M WANG , 等 . Characterization of a double Time-Of-Flight detector system for accurate velocity measurement in a storage ring using laser beams . Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2019 . 931 52 - 59 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=6b160c13e4938775f3cb82bbcce074a0 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=6b160c13e4938775f3cb82bbcce074a0 .

骆公序 , 荆超 , 汪于涛 , 等 . 紫外皮秒激光刻蚀体硅工艺研究 . 应用激光 , 2019 . 39 ( 6 ): 1002 - 1005 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yyjg201906015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yyjg201906015 .

G X LUO , CH JING , Y T WANG , 等 . UV picosecond laser direct etching on bulk silicon . Applied Laser , 2019 . 39 ( 6 ): 1002 - 1005 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yyjg201906015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yyjg201906015 .

牛娜 , 曲大鹏 , 郑权 , 等 . 蓝光二极管泵浦Pr:YLF腔内倍频348.9nm紫外激光器 . 中国激光 , 2018 . 45 ( 12 ): 1201003 http://www.cnki.com.cn/Article/CJFDTotal-JJZZ20180809002.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ20180809002.htm .

N NIU , D P QU , Q ZHENG , 等 . Ultraviolet Laser by Intracavity Frequency Doubling of Blue Laser Diode Pumped Pr:YLF at 348.9nm . Chinese Journal of Lasers , 2018 . 45 ( 12 ): 1201003 http://www.cnki.com.cn/Article/CJFDTotal-JJZZ20180809002.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ20180809002.htm .

J SAKUMA , Y ASAKAWA , T IMAHOKO , 等 . Generation of all-solid-state, high-power continuous-wave 213-nm light based on sum-frequency mixing in CsLiB 6 O 10 . Optics Letters , 2004 . 29 ( 10 ): 1096 - 1098 . DOI: 10.1364/OL.29.001096 http://doi.org/10.1364/OL.29.001096 .

苏艳丽 , 姜其畅 . 全固化213 nm深紫外激光技术研究 . 重庆师范大学学报(自然科学版) , 2009 . 26 ( 1 ): 82 - 84 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqsfxyxb200901020 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqsfxyxb200901020 .

Y L SU , Q C JIANG . Study of All-solid-state Deep-ultraviolet Laser Technology at 213 nm . Journal of Chongqing Normal University (Natural Science) , 2009 . 26 ( 1 ): 82 - 84 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqsfxyxb200901020 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=cqsfxyxb200901020 .

岱钦 , 史瑞新 , 崔建丰 , 等 . 脉冲LD泵浦电光调Q深紫外激光器 . 发光学报 , 2016 . 37 ( 4 ): 463 - 466 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=fgxb201604014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=fgxb201604014 .

Q DAI , R X SHI , J F CUI , 等 . Pulse LD pumped EO-Q switched DUV laser . Chinese Journal of Luminescence , 2016 . 37 ( 4 ): 463 - 466 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=fgxb201604014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=fgxb201604014 .

朱浩 , 张朝阳 , 徐坤 , 等 . 硬脆材料皮秒激光微加工试验研究 . 电加工与模具 , 2020 . ( 1 ): 43 - 46 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=djgymj202001010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=djgymj202001010 .

H ZHU , ZH Y ZHANG , K XU , 等 . The experimental study of micro-machining of hard-brittle materials using ultra-short picosecond laser . Electromachining & Mould , 2020 . ( 1 ): 43 - 46 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=djgymj202001010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=djgymj202001010 .

长春新产业光电技术有限公司[EB/OL]. http://www.cnilaser.com http://www.cnilaser.com .

Changchun New Industries Optoelectronics Technology Co., Ltd.[EB/OL]. http://www.cnilaser.com http://www.cnilaser.com . (in Chinese)

况庆强 , 桑明煌 , 聂义友 , 等 . 被动锁模掺铒光纤激光器中的有理数谐波锁模 . 光学精密工程 , 2009 . 17 ( 11 ): 2719 - 2723 . http://ope.lightpublishing.cn/thesisDetails?columnId=1746470&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1746470&Fpath=&index=-1&l=zh .

Q Q KUANG , M H SANG , Y Y NIE , 等 . Rational harmonic mode-locking of passively mode-locked erbium-doped fiber laser . Opt. Precision Eng. , 2009 . 17 ( 11 ): 2719 - 2723 . http://ope.lightpublishing.cn/thesisDetails?columnId=1746470&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1746470&Fpath=&index=-1&l=zh .

张小菲 , 黄楚云 , 李根 . 基于SESAM镜的全光纤皮秒激光器腔内脉冲传输特性研究 . 激光杂志 , 2015 . 36 ( 8 ): 24 - 27 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgzz201508008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgzz201508008 .

X F ZHANG , CH Y HUANG , G LI . Research on the transmission characteristics of the pulse in the cavity of all-fiber picosecond lasers based on SESAM . Laser Journal , 2015 . 36 ( 8 ): 24 - 27 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgzz201508008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgzz201508008 .

韦小乐 , 魏淮 , 盛泉 , 等 . 重复频率1.2 GHz皮秒脉冲全光纤掺镱激光器 . 光子学报 , 2019 . 48 ( 11 ): 1148015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201911014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201911014 .

X L WEI , H WEI , Q SHENG , 等 . Picosecond pulsed all-fiber Yb-doped laser with 1.2 GHz repetition rate . Acta Photonica Sinica , 2019 . 48 ( 11 ): 1148015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201911014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201911014 .

姚建铨 , 徐德刚 . 全固态激光及非线性光学频率变换技术 , : 北京科学出版社 , 2007 .

J Q YAO , D G XU . All Solid State Laser and Nonlinear Optical Frequency Conversion Technology , : Beijing Science Publishing & Media Ltd. , 2007 .

谢仕永 , 王久旺 , 孙勇 , 等 . 垂直腔面发射激光端面泵浦的高能量调 Q Nd: YAG激光 . 光学精密工程 , 2020 . 28 ( 3 ): 558 - 564 . http://ope.lightpublishing.cn/thesisDetails?columnId=2127169&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2127169&Fpath=&index=-1&l=zh .

SH Y XIE , J W WANG , Y SUN , 等 . VCSEL end-pumped high-energy Q -switched Nd: YAG laser . Opt. Precision Eng. , 2020 . 28 ( 3 ): 558 - 564 . http://ope.lightpublishing.cn/thesisDetails?columnId=2127169&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2127169&Fpath=&index=-1&l=zh .

高志红 , 张文喜 , 郭晓丽 , 等 . 基于楔形Nd: YVO4/KTP双折射滤波的单频绿光激光器 . 中国激光 , 2020 . 47 ( 3 ): 93 - 99 . http://www.cnki.com.cn/Article/CJFDTotal-JJZZ202003012.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ202003012.htm .

ZH H GAO , W X ZHANG , X L GUO , 等 . Single-frequency green laser based on birefringent filter comprising a wedge nd: YVO4/KTP . Chinese Journal of Lasers , 2020 . 47 ( 3 ): 93 - 99 . http://www.cnki.com.cn/Article/CJFDTotal-JJZZ202003012.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ202003012.htm .

浏览量

415

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

可用于自倍频激光器的Cr³⁺:YAB和Cr³⁺:YGAB晶体光学特性的研究