硅-有机复合集成电光调制器的优化与制备

邹艳慧; 王艺蒙; 张小雪; 武震林; 陈卓; 薄淑晖; 刘若男; 李志华; 王迪; 谭庆贵; 谷一英; 赵明山; 韩秀友

doi:10.37188/OPE.20202810.2138

您当前的位置：

首页 >

文章列表页 >

硅-有机复合集成电光调制器的优化与制备

现代应用光学 | 更新时间：2020-11-16

- 硅-有机复合集成电光调制器的优化与制备
- Optimal design and preparation of silicon-organic hybrid integrated electro-optic modulator
- 光学精密工程 2020年28卷第10期页码：2138-2150
- 作者机构：
  
  1.大连理工大学光电工程与仪器科学学院, 辽宁大连 116024
  2.中国科学院理化技术研究所, 北京 100190
  3.中国科学院微电子研究所, 北京 100029
  4.西安空间无线电技术研究所, 陕西西安 710100
  5.中央民族大学理学院, 北京 100081
- 作者简介：
  
  [ "邹艳慧(1994-), 女, 辽宁朝阳人, 硕士研究生, 2018年于大连理工大学获得学士学位, 主要研究方向为集成电光调制器件。E-mail:zouyanhui@mail.dlut.edu.cn" ]
  韩秀友(1977-), 男, 河北沧州人, 教授, 博士生导师, 2006年于中国科学院上海光学精密机械研究所获得博士学位, 主要从事集成光子学、微波光子学领域的研究。E-mail:xyhan@dlut.edu.cn HAN Xiu-you, E-mail: xyhan@dlut.edu.cn
- 基金信息：
  
  国家重点研发计划项目(2019YFB2203202);国家领域基金重点项目(61404130403);国家自然科学基金资助项目(61875028);国家自然科学基金资助项目(62075026);辽宁省高等学校创新人才支持计划(LR2019017);大连市科技创新基金资助项目(2018J11CY006);大连理工大学大学生创新训练项目(2020101412100010090);大连理工大学大学生创新训练项目(2019101412100010059)
- DOI：10.37188/OPE.20202810.2138
  中图分类号： TN256;TN252
- 收稿日期：2020-02-19，
  
  修回日期：2020-04-08，
  
  录用日期：2020-4-8，
  
  纸质出版日期：2020-10-25
- 稿件说明：
移动端阅览
邹艳慧, 王艺蒙, 张小雪, 等. 硅-有机复合集成电光调制器的优化与制备[J]. 光学精密工程, 2020,28(10):2138-2150.

Yan-hui ZOU, Yi-meng WANG, Xiao-xue ZHANG, et al. Optimal design and preparation of silicon-organic hybrid integrated electro-optic modulator[J]. Optics and precision engineering, 2020, 28(10): 2138-2150.
邹艳慧, 王艺蒙, 张小雪, 等. 硅-有机复合集成电光调制器的优化与制备[J]. 光学精密工程, 2020,28(10):2138-2150. DOI： 10.37188/OPE.20202810.2138.

Yan-hui ZOU, Yi-meng WANG, Xiao-xue ZHANG, et al. Optimal design and preparation of silicon-organic hybrid integrated electro-optic modulator[J]. Optics and precision engineering, 2020, 28(10): 2138-2150. DOI： 10.37188/OPE.20202810.2138.

摘要

硅-有机复合光子集成技术充分发挥了硅光的大规模集成优势和有机聚合物材料的高电光系数优势，在高性能集成微波光子系统中极具应用潜力。本文对硅-有机复合集成电光调制器结构进行了较为全面地优化设计和初步制备研究。电光有机聚合物填充在硅Slot波导的狭缝中，优化Slot波导结构得到光场限制因子为0.32，使得光波场与射频电场高度重合，提高了电光调制效率。采用锥型波导模式转换结构实现Strip-to-Slot的低损耗耦合，耦合效率为99.55%。重点分析了电极长度、宽度等参数对调制器频率响应的影响，优化得到3 dB带宽为77 GHz，半波电压-长度积为0.045 V·cm。根据仿真结果设计了用于制备调制器的MASK。实验制备了Slot波导并进行了聚合物的填充实验研究，获得了良好的结果。

Abstract

Silicon-organic hybrid photonic integration technology fully utilizes the advantages of large-scale integration of silicon photonics and the high electro-optic coefficient of organic polymer materials. This accords great application potential in high-performance integrated microwave photonics systems to it. This paper discusses a comprehensive optimal structural design and preliminary preparation of a silicon-organic hybrid integrated electro-optic modulator. The slit of the silicon slot waveguide is filled with electro-optic organic polymer. The optical field confinement factor reaches 0.32 when the structure of the slot waveguide is optimized. The optical wave field and radio-frequency electric field overlap considerably

thereby improving the electro-optic modulation efficiency. The tapered waveguide mode conversion structure is used to achieve low-loss coupling between the strip and slot waveguides with a acoupling efficiency of 99.55%. The frequency modulation response is addressed by analyzing the influence of the electrode length and width. The 3 dB bandwidth is optimized to 77 GHz

and the half-wave voltage-length product reaches 0.045 V·cm. The MASK used in manufacturing the modulator is designed based on the simulation results. Experiments involving the slot waveguide and the filling polymer in the slot waveguide are performed with good results.

关键词

Keywords

references

田中成 , 靳学明 , 朱玉鹏 . 微波光子电子战技术原理与应用 , : 北京科学出版社 , 2018 .

ZH CH TIAN , X M JIN , Y P ZHU . Principles and Applications of Microwave Photonic Electronic Warfare Technology , : Beijing Science Press , 2018 .

祝宁华 , 李明 , 郝跃 . 光电子器件与集成技术 . 中国科学:信息科学 , 2016 . 46 ( 8 ): 1156 - 1174 . http://www.cqvip.com/QK/89854X/20168/669904190.html http://www.cqvip.com/QK/89854X/20168/669904190.html .

N H ZHU , M LI , Y HAO . Optoelectronic devices and integration technologies . Scientia Sinica. Informationis , 2016 . 46 ( 8 ): 1156 - 1174 . http://www.cqvip.com/QK/89854X/20168/669904190.html http://www.cqvip.com/QK/89854X/20168/669904190.html .

高晖 , 邓晔 , 张金平 , 等 . 微波光子相控阵的技术分析与展望 . 雷达学报 , 2019 . 8 ( 2 ): 251 - 261 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ldxb201902010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ldxb201902010 .

H GAO , Y DENG , J P ZHANG , 等 . Analysis and prospects of phased array radar based on microwave photonics . Journal of Radars , 2019 . 8 ( 2 ): 251 - 261 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ldxb201902010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=ldxb201902010 .

D MARPAUNG , J P YAO , J CAPMANY . Integrated microwave photonics . Nature Photonics , 2019 . 13 ( 2 ): 80 - 90 . DOI: 10.1038/s41566-018-0310-5 http://doi.org/10.1038/s41566-018-0310-5 .

李金野 , 于丽娟 , 刘建国 . 宽带电光调制器的研究现状与新型硅基混合集成调制器的发展趋势 . 中兴通讯技术 , 2017 . 23 ( 5 ): 15 - 20 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zxtxjs201705004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zxtxjs201705004 .

J Y LI , L J YU , J G LIU . Broadband electro-optical modulator and development trend of new silicon-based hybrid integrated modulator . ZTE Technology Journal , 2017 . 23 ( 5 ): 15 - 20 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zxtxjs201705004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zxtxjs201705004 .

E L WOOTEN , K M KISSA , A YI-YAN , 等 . A review of lithium niobate modulators for fiber-optic communications systems . IEEE Journal of Selected Topics in Quantum Electronics , 2000 . 6 ( 1 ): 69 - 82 . DOI: 10.1109/2944.826874 http://doi.org/10.1109/2944.826874 .

A RAO , A PATIL , P RABIEI , 等 . High-performance and linear thin-film lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz . Optics Letters , 2016 . 41 ( 24 ): 5700 - 5703 . DOI: 10.1364/OL.41.005700 http://doi.org/10.1364/OL.41.005700 .

P O WEIGEL , J ZHAO , K FANG , 等 . Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth . Optics Express , 2018 . 26 ( 18 ): 23728 - 23739 . DOI: 10.1364/OE.26.023728 http://doi.org/10.1364/OE.26.023728 .

C WANG , M ZHANG , B STERN , 等 . Nanophotonic lithium niobate electro-optic modulators . Optics Express , 2018 . 26 ( 2 ): 1547 - 1555 . DOI: 10.1364/OE.26.001547 http://doi.org/10.1364/OE.26.001547 .

M B HE , M Y XU , Y X REN , 等 . High-performance hybrid silicon and lithium niobate Mach-Zehnder modulators for 100 Gbit·s -1 and beyond . Nature Photonics , 2019 . 13 ( 5 ): 359 - 364 . DOI: 10.1038/s41566-019-0378-6 http://doi.org/10.1038/s41566-019-0378-6 .

M LEE , H E KATZ , C ERBEN , 等 . Broadband modulation of light by using an electro-optic polymer . Science , 2002 . 298 ( 5597 ): 1401 - 1403 . DOI: 10.1126/science.1077446 http://doi.org/10.1126/science.1077446 .

J LIU , G XU , F LIU , 等 . Recent advances in polymer electro-optic modulators . RSC Advances , 2015 . 5 ( 21 ): 15784 - 15794 . DOI: 10.1039/C4RA13250E http://doi.org/10.1039/C4RA13250E .

A S LIU , L LIAO , D RUBIN , 等 . High-speed optical modulation based on carrier depletion in a silicon waveguide . Optics Express , 2007 . 15 ( 2 ): 660 - 668 . DOI: 10.1364/OE.15.000660 http://doi.org/10.1364/OE.15.000660 .

P DONG , L CHEN , Y K CHEN . High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators . Optics Express , 2012 . 20 ( 6 ): 6163 - 6169 . DOI: 10.1364/OE.20.006163 http://doi.org/10.1364/OE.20.006163 .

M F LI , L WANG , X LI , 等 . Silicon intensity Mach-Zehnder modulator for single lane 100 Gb/s applications . Photonics Research , 2018 . 6 ( 2 ): 109 - 116 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0120180804982124 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0120180804982124 .

齐影 , 安俊明 , 王玥 , 等 . 硅-有机材料混合电光调制器的原理及研究进展 . 激光与光电子学进展 , 2015 . 52 ( 7 ): 070004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201507004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201507004 .

Y QI , J M AN , Y WANG , 等 . Principle and progress of silicon-organic hybrid electro-optic modulators . Laser & Optoelectronics Progress , 2015 . 52 ( 7 ): 070004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201507004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jgygdzxjz201507004 .

X Y ZHANG , C J CHUNG , A HOSSEINI , 等 . High performance optical modulator based on electro-optic polymer filled silicon slot photonic crystal waveguide . Journal of Lightwave Technology , 2016 . 34 ( 12 ): 2941 - 2951 . DOI: 10.1109/JLT.2015.2471853 http://doi.org/10.1109/JLT.2015.2471853 .

C KOOS , P VORREAU , T VALLAITIS , 等 . All-optical high-speed signal processing with silicon-organic hybrid slot waveguides . Nature Photonics , 2009 . 3 ( 4 ): 216 DOI: 10.1038/nphoton.2009.25 http://doi.org/10.1038/nphoton.2009.25 .

L ALLOATTI , R PALMER , S DIEBOLD , 等 . 100 GHz silicon-organic hybrid modulator . Light: Science & Applications , 2014 . 3 ( 5 ): e173 http://www.nature.com/articles/lsa201454 http://www.nature.com/articles/lsa201454 .

S WOLF , H ZWICKEL , W HARTMANN , 等 . Silicon-organic hybrid (SOH) Mach-Zehnder modulators for 100 gbit/s on-off keying . Scientific Reports , 8 ( 1 ): 2598 DOI: 10.1038/s41598-017-19061-8 http://doi.org/10.1038/s41598-017-19061-8 .

UMMETHALA S, KEMAL J N, LAUERMANN M, et al .. Capacitively coupled silicon-organic hybrid modulator for 200 gbit/s PAM-4 signaling[C]. Conference on Lasers and Electro-Optics. San Jose , California . Washington , D.C .: OSA , 2019.

C KIENINGER , Y KUTUVANTAVIDA , D L ELDER , 等 . Ultra-high electro-optic activity demonstrated in a silicon-organic hybrid modulator . Optica , 2018 . 5 ( 6 ): 739 DOI: 10.1364/OPTICA.5.000739 http://doi.org/10.1364/OPTICA.5.000739 .

KIENINGER C, FVLLNER C, ZWICKEL H, et al .. SOH Mach-Zehnder modulators for 100 GBd PAM4 signaling with sub-1 dB phase-shifter loss[C]. Optical Fiber Communication Conference ( OFC ) 2020. San Diego , California. Washington , D.C .: OSA , 2020.

J LEUTHOLD , C KOOS , W FREUDE , 等 . Silicon-organic hybrid electro-optical devices . IEEE Journal of Selected Topics in Quantum Electronics , 2013 . 19 ( 6 ): 114 - 126 . DOI: 10.1109/JSTQE.2013.2271846 http://doi.org/10.1109/JSTQE.2013.2271846 .

W HENI , Y KUTUVANTAVIDA , C HAFFNER , 等 . Silicon-organic and plasmonic-organic hybrid photonics . ACS Photonics , 2017 . 4 ( 7 ): 1576 - 1590 . DOI: 10.1021/acsphotonics.7b00224 http://doi.org/10.1021/acsphotonics.7b00224 .

H SATO , H MIURA , F QIU , 等 . Low driving voltage Mach-Zehnder interference modulator constructed from an electro-optic polymer on ultra-thin silicon with a broadband operation . Optics Express , 2017 . 25 ( 2 ): 768 - 775 . DOI: 10.1364/OE.25.000768 http://doi.org/10.1364/OE.25.000768 .

YOKOYAMA S, LU G W, CHENG X Y, et al .. Long-term stable electro-optic polymer for hybrid integration[C]. Optical Fiber Communication Conference ( OFC ) 2019. San Diego , California. Washington , D.C .: OSA , 2019.

T BAEHR-JONES , M HOCHBERG , C C WALKER , 等 . High- Q optical resonators in silicon-on-insulator-based slot waveguides . Applied Physics Letters , 2005 . 86 ( 8 ): 081101 DOI: 10.1063/1.1871360 http://doi.org/10.1063/1.1871360 .

Q Z DENG , L LIU , X B LI , 等 . Strip-slot waveguide mode converter based on symmetric multimode interference . Optics Letters , 2014 . 39 ( 19 ): 5665 - 5668 . DOI: 10.1364/OL.39.005665 http://doi.org/10.1364/OL.39.005665 .

浏览量

245

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据