空间光调制器像素结构对波前重建的影响

肖昭贤; 温金鹏; 赵自新; 樊晨

doi:10.37188/OPE.20202810.2151

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空间光调制器像素结构对波前重建的影响

现代应用光学 | 更新时间：2020-11-16

- 空间光调制器像素结构对波前重建的影响
- Impact of spatial light modulator pixel structure on wavefront reconstruction
- 光学精密工程 2020年28卷第10期页码：2151-2157
- 作者机构：
  
  1.中国工程物理研究院总体工程研究所, 四川绵阳 621999
  2.西安交通大学机械工程学院机械制造系统国家重点实验室, 陕西西安 710049
- 作者简介：
  
  [ "肖昭贤(1993-), 男, 四川达州人, 硕士, 助理工程师, 2015年于重庆大学获得学士学位, 2018年于西安交通大学获得硕士学位, 主要从事动态零位干涉测量及结构设计方面的研究。E-mail:412xiaozx@caep.cn" ]
- 基金信息：
  
  中国工程物理研究院创新发展基金2019年度培育项目(PY2019039);国家自然科学基金青年基金资助项目(5175404)
- DOI：10.37188/OPE.20202810.2151
  中图分类号： O439
- 收稿日期：2020-02-25，
  
  修回日期：2020-04-02，
  
  录用日期：2020-4-2，
  
  纸质出版日期：2020-10-25
- 稿件说明：
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肖昭贤, 温金鹏, 赵自新, 等. 空间光调制器像素结构对波前重建的影响[J]. 光学精密工程, 2020,28(10):2151-2157.

Zhao-xian XIAO, Jin-peng WEN, Zi-xin ZHAO, et al. Impact of spatial light modulator pixel structure on wavefront reconstruction[J]. Optics and precision engineering, 2020, 28(10): 2151-2157.
肖昭贤, 温金鹏, 赵自新, 等. 空间光调制器像素结构对波前重建的影响[J]. 光学精密工程, 2020,28(10):2151-2157. DOI： 10.37188/OPE.20202810.2151.

Zhao-xian XIAO, Jin-peng WEN, Zi-xin ZHAO, et al. Impact of spatial light modulator pixel structure on wavefront reconstruction[J]. Optics and precision engineering, 2020, 28(10): 2151-2157. DOI： 10.37188/OPE.20202810.2151.

摘要

在利用液晶空间光调制器液晶分子等效折射率的变化实现光波前的动态调控，从而进行光学非球面的零位干涉测量时，液晶空间光调制器独立单元中像素离散化的尺度、单元结构的填充比例以及电控数字位阶都直接影响到波前调控精度。本文基于菲涅耳衍射原理以及离散傅里叶变换算法，使用物理光场数值分析软件VirtualLabTM分析了像素独立单元对液晶空间光调制器重建补偿波面精度的影响，建立波面经空间光调制器调制传播至待测表面的仿真模型，评估像素结构因素对波前重建的理论算法本底误差及构成像素结构的多因素耦合误差，重点关注像素尺寸采样频率与波前最大空间频率的匹配问题，提出根据重建波前理论模型反推选取符合高精度测量要求的空间光调制器，可有效降低动态检测系统的成本需求。理论计算得到制约空间光调制器重建高精度波面(RMS=0.01

)的因素与液晶分子响应的自身非线性以及基底空间不一致密切相关。

Abstract

The change of the equivalent refractive index of liquid crystal molecules in liquid crystal spatial light modulators has been used to achieve dynamic control of optical wavefronts

thus realizing zero position interference measurements of optical aspheric surfaces. However

the pixel pitch

filling ratio of the cell structure

and gray-level number directly affect the accuracy of wavefront control. This study is based on Fresnel diffraction theory and the discrete Fourier transform algorithm.The physical light field was analyzed using a numerical analysis software

VirtualLabTM.The influence of pixel-independent units on the reconstruction compensation wavefront precision of the liquid crystal spatial light modulator was investigated

and a simulation model of the wavefront propagating through the spatial light modulator to the surface to be measured was established.The theoretical algorithm's background error of wavefront reconstruction caused by the pixel structure factor was evaluated

and the multifactor coupling error of the image structure was determined by focusing on the sampling frequency of pixel size and the maximum space of thewavefront.For the frequency matching problem

a spatial light modulator was selected to meet the requirements of high-precision measurement according to the theoretical model of the reconstructed wavefront

thereby effectively reducing the cost of the dynamic detection system. Theoretical calculation shows that the factors that restrict the spatial light modulator in reconstructing the high-precision wavefront (root mean square error of 0.01

) are closely related to the nonlinearity of the liquid crystal molecular response and the inconsistency of the substrate space.

关键词

Keywords

references

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