应用于高速离子电导扫描成像的双压电定位平台

庄健; 王志武; 廖晓波

doi:10.37188/OPE.20202810.2203

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应用于高速离子电导扫描成像的双压电定位平台

微纳技术与精密机械 | 更新时间：2020-11-16

- 应用于高速离子电导扫描成像的双压电定位平台
- Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging
- 光学精密工程 2020年28卷第10期页码：2203-2214
- 作者机构：
  
  1.西安交通大学机械工程学院, 陕西西安 710049
  2.西南科技大学制造科学与工程学院, 四川绵阳 621010
- 作者简介：
  
  [ "庄健(1974-), 男, 江苏南通人, 博士, 教授, 博士生导师, 1996年、1999年、2002年于西安交通大学分别获得学士、硕士和博士学位, 主要研究方向为微纳测量技术、智能优化算法和机电控制系统。E-mail:zhuangjian@mail.xjtu.edu.cn" ]
  [ "王志武(1987-), 男, 内蒙古乌兰察布人, 博士研究生, 主要研究方向为离子电导显微技术成像系统的研究。E-mail:wangzhiwu@stu.xjtu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金面上项目(51375363);陕西省科技厅工业公关项目(2013GY2-04);中央高校基本科研业务费专项资金资助项目(Z201707084)
- DOI：10.37188/OPE.20202810.2203
  中图分类号： TN384
- 收稿日期：2020-04-23，
  
  修回日期：2020-06-05，
  
  录用日期：2020-6-5，
  
  纸质出版日期：2020-10-25
- 稿件说明：
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庄健, 王志武, 廖晓波. 应用于高速离子电导扫描成像的双压电定位平台[J]. 光学精密工程, 2020,28(10):2203-2214.

Jian ZHUANG, Zhi-wu WANG, Xiao-bo LIAO. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Optics and precision engineering, 2020, 28(10): 2203-2214.
庄健, 王志武, 廖晓波. 应用于高速离子电导扫描成像的双压电定位平台[J]. 光学精密工程, 2020,28(10):2203-2214. DOI： 10.37188/OPE.20202810.2203.

Jian ZHUANG, Zhi-wu WANG, Xiao-bo LIAO. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Optics and precision engineering, 2020, 28(10): 2203-2214. DOI： 10.37188/OPE.20202810.2203.

摘要

为了解决离子电导显微成像系统中传统跳跃工作模式高速扫描时存在的运动过冲以及成像速度慢的问题，提出了一种基于双压电纳米定位平台的高速扫描方法。根据扫描系统需求提出了采用大行程-慢速和小行程-快速压电纳米定位平台串联的设计方案，满足探针

向测量量程要求并可快速回提探针。以菱形位移放大机构和导向机构为构型，设计并确定双压电驱动扫描平台的关键几何参数。基于解析模型计算了定位平台的静力学性能参数并采用有限元分析方法分析了双压电平台的静/动态特性。最后，加工了双压电平台样机并进行了离子电流过冲和形貌扫描成像的测试。实验结果表明：所设计的双压电驱动探针定位平台在保证成像稳定的前提下可使下探速度至少达到500 nm/ms，有效地减小了电流过冲，提高了系统成像效率。

Abstract

To address motion overshoot and low imaging speed of the hopping mode inconventional scanning ion-conductance microscopy (SICM)

this paper proposes a high-speed scanning method based on a dual-stage nanopositioning system. A design scheme consisting of a long-range actuator operating along with a high-speed actuator is proposed

according to the need for the SICM measurement range in the

direction.The pipet probe can approach the sample surface with a highspeed

without contact. Rhombus-type amplification and guiding mechanism are used as the basic configuration.The key parameters of the dual-stage nanopositioner are determined by an analytical modeling. The static and dynamic characteristics of the dual-stage nanopositioner are evaluated via finite-element analysis. The final prototype is processed and overshoot and imaging experiments are performed. Experimental results show that the designed

direction nanopositioning stage driven by the dual actuator can significantly improve the probe approach speed to at least 500 nm/ms

which effectively improves the imaging efficiency of the hopping mode

without reducing the imaging stability.

关键词

Keywords

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