微型多参数水质传感器芯片的设计及应用

王鑫; 施云波

doi:10.37188/OPE.20202810.2215

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微型多参数水质传感器芯片的设计及应用

微纳技术与精密机械 | 更新时间：2020-11-16

- 微型多参数水质传感器芯片的设计及应用
- Design and application of miniature multi-parameter water quality sensor chip
- 光学精密工程 2020年28卷第10期页码：2215-2226
- 作者机构：
  
  1.哈尔滨理工大学测控技术与通信工程学院, 黑龙江哈尔滨 150080
  2.苏州大学机电工程学院, 江苏苏州 215301
- 作者简介：
  
  [ "王鑫(1983-), 女, 黑龙江人, 副教授, 博士研究生, 2005年、2008年于哈尔滨理工大学分别获得学士、硕士学位, 主要研究方向为MEMS传感器及微系统。E-mail:wangxin6711545@163.com" ]
  施云波(1966-), 男, 吉林人, 教授, 博士生导师, 1987年于天津大学获得学士学位, 2002年于福州大学获得硕士学位, 2008年于哈尔滨理工大学获得博士学位, 现为哈尔滨理工大学测控技术与通信工程学院系主任, 主要研究方向为MEMS传感器及微系统, 测试和系统集成技术。E-mail:shiyunbo@hrbust.edu.cn SHI Yun-bo, E-mail:shiyunbo@hrbust.edu.cn
- 基金信息：
  
  国防工业技术发展计划资助项目(JCKY2017412C003)
- DOI：10.37188/OPE.20202810.2215
  中图分类号： TP212.2
- 收稿日期：2020-04-30，
  
  修回日期：2020-06-01，
  
  录用日期：2020-6-1，
  
  纸质出版日期：2020-10-25
- 稿件说明：
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王鑫, 施云波. 微型多参数水质传感器芯片的设计及应用[J]. 光学精密工程, 2020,28(10):2215-2226.

Xin WANG, Yun-bo SHI. Design and application of miniature multi-parameter water quality sensor chip[J]. Optics and precision engineering, 2020, 28(10): 2215-2226.
王鑫, 施云波. 微型多参数水质传感器芯片的设计及应用[J]. 光学精密工程, 2020,28(10):2215-2226. DOI： 10.37188/OPE.20202810.2215.

Xin WANG, Yun-bo SHI. Design and application of miniature multi-parameter water quality sensor chip[J]. Optics and precision engineering, 2020, 28(10): 2215-2226. DOI： 10.37188/OPE.20202810.2215.

摘要

针对目前水质参数传感器测量功能单一，且受环境温度影响大等问题，提出了一种具有温度补偿功能的多参数水质传感器芯片。该传感器芯片是使用微机电系统（MEMS）技术制造的，芯片表面集成了pH传感器、DO传感器、氨氮传感器和温度传感器。为实现温度补偿，芯片还设计了一种夹心板式蛇形Pt电阻加热器。同时设计了与芯片相适应的微流控测试腔，以实现水样测量。采用有限元稳态热分析对4种加热器热传递过程进行分析，得到合理的芯片结构布局，通过MEMS工艺制作出传感器芯片。采用自制的恒电位仪测试电路，对传感器芯片性能进行了测试。实验结果表明，pH传感器具有0.288 mA/pH的高灵敏度；溶解氧（DO）传感器的灵敏度为2.22

A/（mg·L

-1

）；氨氮传感器的灵敏度为0.113 9 mA/（mg·L

-1

）；温度传感器的灵敏度为0.949 Ω/℃；加热器的功率和温度变化灵敏度为0.312 6℃/mW。与单个水质参数传感器相比，该传感器芯片体积小、坚固耐用，能够同时检测水样的多种参数，且温度补偿效果较好。

Abstract

Water-quality sensors feature a single measurement function and are greatly affected by ambient temperature. This paper proposes a multi-parameter water-quality sensor chip with temperature compensation. The sensor chip was manufactured using the micro-electro-mechanical system (MEMS) technology. The chip surface contained integrated pH

dissolved oxygen (DO)

ammonia-nitrogen

and temperature sensors. To achieve temperature compensation

the chip was also designed with a sandwich-plate snake Pt resistance heater. At the same time

a microfluidic test chamber that was matched with the chip was designed to realize water-sample measurement. Finite-element steady-state thermal analysis was used to analyze the heat-transfer process of four heaters

and a reasonable chip-structure layout was established. Thereafter

the sensor chip was fabricated using the MEMS technology. The performance of the sensor chip was investigated using a laboratory-developed potentiostat test circuit. Experimental results show that the pH sensor has a high sensitivity of 0.288 mA/pH.The sensitivity of the temperature sensor is 0.949 Ω/℃ and that of the ammonia-nitrogen sensor was 0.113 9 mA/(mg·L

-1

). The sensitivity of the DO sensor is 2.22

A/(mg·L

-1

) and that of the temperature sensor

which changes with respect to the heater power

is 0.312 6 ℃/mW. Compared with a single water-quality parameter sensor

the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and exhibited a good temperature-compensation effect. Moreover

the sensor chip was small in size

robust

and highly accurate.

关键词

Keywords

references

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